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A comprehensive review of the electroactive materials for non-enzymatic glucose sensing and sensing devices has been performed in this work. A general introduction for glucose sensing, a facile electrochemical technique for glucose detection, and explanations of fundamental mechanisms for the electro-oxidation of glucose via the electrochemical technique are conducted. The glucose sensing materials are classified into five major systems: (1) mono-metallic materials, (2) bi-metallic materials, (3) metallic-oxide compounds, (4) metallic-hydroxide materials, and (5) metal-metal derivatives. The performances of various systems within this decade have been compared and explained in terms of sensitivity, linear regime, the limit of detection (LOD), and detection potentials. Some promising materials and practicable methodologies for the further developments of glucose sensors have been proposed. Firstly, the atomic deposition of alloys is expected to enhance the selectivity, which is considered to be lacking in non-enzymatic glucose sensing. Secondly, by using the modification of the hydrophilicity of the metallic-oxides, a promoted current response from the electro-oxidation of glucose is expected. Lastly, by taking the advantage of the redistribution phenomenon of the oxide particles, the usage of the noble metals is foreseen to be reduced.
Wan-Ting Chiu; Tso-Fu Chang; Masato Sone; Hideki Hosoda; Agnès Tixier-Mita; Hiroshi Toshiyoshi. Developments of the Electroactive Materials for Non-Enzymatic Glucose Sensing and Their Mechanisms. Electrochem 2021, 2, 347 -389.
AMA StyleWan-Ting Chiu, Tso-Fu Chang, Masato Sone, Hideki Hosoda, Agnès Tixier-Mita, Hiroshi Toshiyoshi. Developments of the Electroactive Materials for Non-Enzymatic Glucose Sensing and Their Mechanisms. Electrochem. 2021; 2 (2):347-389.
Chicago/Turabian StyleWan-Ting Chiu; Tso-Fu Chang; Masato Sone; Hideki Hosoda; Agnès Tixier-Mita; Hiroshi Toshiyoshi. 2021. "Developments of the Electroactive Materials for Non-Enzymatic Glucose Sensing and Their Mechanisms." Electrochem 2, no. 2: 347-389.
Ti/Au multi-layered micro-cantilevers with complex three-dimensional structures used as micro-components in micro-electromechanical systems (MEMS) sensors were prepared by lithography and electrodeposition, and the effective Young’s modulus was evaluated by the resonance frequency method and finite element method simulation. Effects of the constraint condition at the fixed-end of the micro-cantilever and the temperature dependency of the effective Young’s modulus were studied. Three types of the constraint at the fixed-end were prepared, which were normal type (constraining only bottom surface of the fixed-end), block type (constraining both top and bottom surfaces), and bridge type (top surfaces covering with a bridge-like structure). The temperature dependency test was conducted in a temperature range from 150 to 300 °C in a vacuum chamber. An increase in the effective Young’s modulus was observed as the constraint condition became more rigid, and the effective Young’s modulus merely changed as the temperature varied from room temperature to 300 °C.
Hitomi Watanabe; Tso-Fu Chang; Michael Schneider; Ulrich Schmid; Chun-Yi Chen; Shinichi Iida; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem 2021, 2, 216 -223.
AMA StyleHitomi Watanabe, Tso-Fu Chang, Michael Schneider, Ulrich Schmid, Chun-Yi Chen, Shinichi Iida, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency. Electrochem. 2021; 2 (2):216-223.
Chicago/Turabian StyleHitomi Watanabe; Tso-Fu Chang; Michael Schneider; Ulrich Schmid; Chun-Yi Chen; Shinichi Iida; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. 2021. "Effective Young’s Modulus of Complex Three Dimensional Multilayered Ti/Au Micro-Cantilevers Fabricated by Electrodeposition and the Temperature Dependency." Electrochem 2, no. 2: 216-223.
Tokihiro Hotta; Tso-Fu Mark Chang; Chun-Yi Chen; Hidekazu Sawae; Yu Imada; Masanori Mizoguchi; Osamu Kudo; Ryu Maeda; Masato Sone. Micro-Compression Characterization and Thermal Stability of Electrolessly Plated Nickel Phosphorus Alloy. ECS Journal of Solid State Science and Technology 2021, 10, 035007 .
AMA StyleTokihiro Hotta, Tso-Fu Mark Chang, Chun-Yi Chen, Hidekazu Sawae, Yu Imada, Masanori Mizoguchi, Osamu Kudo, Ryu Maeda, Masato Sone. Micro-Compression Characterization and Thermal Stability of Electrolessly Plated Nickel Phosphorus Alloy. ECS Journal of Solid State Science and Technology. 2021; 10 (3):035007.
Chicago/Turabian StyleTokihiro Hotta; Tso-Fu Mark Chang; Chun-Yi Chen; Hidekazu Sawae; Yu Imada; Masanori Mizoguchi; Osamu Kudo; Ryu Maeda; Masato Sone. 2021. "Micro-Compression Characterization and Thermal Stability of Electrolessly Plated Nickel Phosphorus Alloy." ECS Journal of Solid State Science and Technology 10, no. 3: 035007.
Porous polymers have been synthesized by an aza-Michael addition reaction of a multi-functional acrylamide, N,N′,N″,N‴-tetraacryloyltriethylenetetramine (AM4), and hexamethylene diamine (HDA) in H2O without catalyst. Reaction conditions, such as monomer concentration and reaction temperature, affected the morphology of the resulting porous structures. Connected spheres, co-continuous monolithic structures and/or isolated holes were observed on the surface of the porous polymers. These structures were formed by polymerization-induced phase separation via spinodal decomposition or highly internal phase separation. The obtained porous polymers were soft and flexible and not breakable by compression. The porous polymers adsorbed various solvents. An AM4-HDA porous polymer could be plated by Ni using an electroless plating process via catalyzation by palladium (II) acetylacetonate following reduction of Ni ions in a plating solution. The intermediate Pd-catalyzed porous polymer promoted the Suzuki-Miyaura cross coupling reaction of 4-bromoanisole and phenylboronic acid.
Naofumi Naga; Minako Ito; Aya Mezaki; Hao-Chun Tang; Tso-Fu Chang; Masato Sone; Hassan Nageh; Tamaki Nakano. Morphology Control and Metallization of Porous Polymers Synthesized by Michael Addition Reactions of a Multi-Functional Acrylamide with a Diamine. Materials 2021, 14, 800 .
AMA StyleNaofumi Naga, Minako Ito, Aya Mezaki, Hao-Chun Tang, Tso-Fu Chang, Masato Sone, Hassan Nageh, Tamaki Nakano. Morphology Control and Metallization of Porous Polymers Synthesized by Michael Addition Reactions of a Multi-Functional Acrylamide with a Diamine. Materials. 2021; 14 (4):800.
Chicago/Turabian StyleNaofumi Naga; Minako Ito; Aya Mezaki; Hao-Chun Tang; Tso-Fu Chang; Masato Sone; Hassan Nageh; Tamaki Nakano. 2021. "Morphology Control and Metallization of Porous Polymers Synthesized by Michael Addition Reactions of a Multi-Functional Acrylamide with a Diamine." Materials 14, no. 4: 800.
Micro-pillars oriented in austenite along [100], [110], and [111] crystallographic directions were fabricated on the corresponding edges of a single crystalline plate of the Ni48Fe20Co5Ga27 magnetic shape memory alloy exhibiting martensitic transformation (MT) at 150 K. Superelastic behavior of pillars, due to micro-compression-induced MT, was investigated at different temperatures from 298 K to 373 K. At room temperature, Young’s moduli of the [100], [110], and [111] pillars in austenite are equal to 5.3 GPa, 7.9 GPa, and 9.9 GPa, respectively, resulting in the linear dependences of the elastic strain reaching up to the record-breaking value of 10%. On increasing temperature, the stress–strain dependencies exhibit changes that are interpreted in terms of the critical behavior on approaching to the end points on the martensite–austenite stress–temperature phase diagrams.
T.-F. M. Chang; V. Chernenko; H.-C. Tang; C.-Y. Chen; A. Umise; M. Tahara; H. Hosoda; M. Sone. Superelastic behavior of single crystalline Ni48Fe20Co5Ga27 micro-pillars near austenite–martensite critical point. AIP Advances 2021, 11, 025213 .
AMA StyleT.-F. M. Chang, V. Chernenko, H.-C. Tang, C.-Y. Chen, A. Umise, M. Tahara, H. Hosoda, M. Sone. Superelastic behavior of single crystalline Ni48Fe20Co5Ga27 micro-pillars near austenite–martensite critical point. AIP Advances. 2021; 11 (2):025213.
Chicago/Turabian StyleT.-F. M. Chang; V. Chernenko; H.-C. Tang; C.-Y. Chen; A. Umise; M. Tahara; H. Hosoda; M. Sone. 2021. "Superelastic behavior of single crystalline Ni48Fe20Co5Ga27 micro-pillars near austenite–martensite critical point." AIP Advances 11, no. 2: 025213.
Nanocrystalline Ni-Co alloy deposits with grain sizes less than 30 nm were produced by electrodeposition with a direct current in a sulfamate bath. Surfaces of the Ni-Co alloy deposits showed granular morphology. The size of the granular particles and the Co content decreased when a lower current density was applied. Addition of NiBr2 and a surface brightener (NSF-E) into the bath resulted in the grain refinement effect and an increase of Co content in the deposit. The grain size reached roughly 14 nm and 60 at.% of Co content in Ni-Co alloys electrodeposited with the bath containing the two additives. Ni-Co alloys obtained in this study showed higher microhardnesses than those of pure Ni and Co deposits prepared under the same condition, which revealed the solid solution strengthening effect. With a decrease in the grain size, the microhardness further increased, and this trend followed the Hall–Petch relationship well. The maximum microhardness value of 862.2 Hv was obtained owing to both the grain boundary and solid solution strengthening effects.
Yiming Jiang; Chun-Yi Chen; Tso-Fu Mark Chang; Xun Luo; Daisuke Yamane; Masato Sone. Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test. Electrochem 2020, 2, 1 -9.
AMA StyleYiming Jiang, Chun-Yi Chen, Tso-Fu Mark Chang, Xun Luo, Daisuke Yamane, Masato Sone. Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test. Electrochem. 2020; 2 (1):1-9.
Chicago/Turabian StyleYiming Jiang; Chun-Yi Chen; Tso-Fu Mark Chang; Xun Luo; Daisuke Yamane; Masato Sone. 2020. "Electrodeposition of Ni-Co Alloys and Their Mechanical Properties by Micro-Vickers Hardness Test." Electrochem 2, no. 1: 1-9.
The aim of this study is to investigate a characteristic deformation behavior of a precipitation strengthening-type Cu-Ni-Si alloy (Cu-2.4Ni-0.51Si-9.3Zn-0.15Sn-0.13Mg) by microcompression specimens. Three micropillars with a square cross-section of 20 × 20 × 40 μm3 were fabricated by focused ion beam (FIB) micromachining apparatus and tested by a machine specially designed for microsized specimens. The three pillars were deformed complicatedly and showed different yield strengths depending on the crystal orientation. The micromechanical tests revealed work hardening by the precipitation clearly. Electron backscattered diffraction analysis of a deformed specimen showed a gradual rotation of grain axis at the grain boundaries after the compression test.
Sari Yanagida; Takashi Nagoshi; Akiyoshi Araki; Tso-Fu Mark Chang; Chun-Yi Chen; Equo Kobayashi; Akira Umise; Hideki Hosoda; Tatsuo Sato; Masato Sone. Heterogeneous Deformation Behavior of Cu-Ni-Si Alloy by Micro-Size Compression Testing. Crystals 2020, 10, 1162 .
AMA StyleSari Yanagida, Takashi Nagoshi, Akiyoshi Araki, Tso-Fu Mark Chang, Chun-Yi Chen, Equo Kobayashi, Akira Umise, Hideki Hosoda, Tatsuo Sato, Masato Sone. Heterogeneous Deformation Behavior of Cu-Ni-Si Alloy by Micro-Size Compression Testing. Crystals. 2020; 10 (12):1162.
Chicago/Turabian StyleSari Yanagida; Takashi Nagoshi; Akiyoshi Araki; Tso-Fu Mark Chang; Chun-Yi Chen; Equo Kobayashi; Akira Umise; Hideki Hosoda; Tatsuo Sato; Masato Sone. 2020. "Heterogeneous Deformation Behavior of Cu-Ni-Si Alloy by Micro-Size Compression Testing." Crystals 10, no. 12: 1162.
The electrochemical properties of Cu deposition by plating solution with supercritical CO2 emulsion (Sc-CO2-E) were investigated using a specially constructed electrochemical measuring apparatus with a rotating disk electrode operable under high pressure. Polarization characteristics were examined with and without mixing Sc-CO2-E into the CuSO4-H2SO4 electroplating solution. Further, the relationship between the limiting current density and the rotation speed of the rotating electrode, that is, Levich plot, was obtained. As a result, a significant increase in the limiting current was observed by mixing Sc-CO2-E. In addition, as a result of estimating the diffusion coefficient D0 of Cu ion and kinematic viscosity coefficient ν of the plating solution when Sc-CO2-E was mixed from gradients of the Levich plot, it was clarified that D0 increased more than twice and ν decreased less than 1/2 compared to before mixing Sc-CO2-E. Therefore, it was suggested that mixing to emulsify the supercritical CO2 and the plating solution can greatly enhance the transfer of Cu ions by convection. Consequently, the use of Cu electrodeposition with Sc-CO2-E should enable plating in narrow spaces where convection cannot reach the level of supply of Cu ions, which was difficult with conventional plating.
Kazuhito Higuchi; Tso-Fu Mark Chang; Masato Sone. Electrochemical Investigation of Cu Electroplating with Supercritical CO2 Emulsion Using a Rotating Disk Electrode under High Pressure. Journal of The Electrochemical Society 2020, 167, 162506 .
AMA StyleKazuhito Higuchi, Tso-Fu Mark Chang, Masato Sone. Electrochemical Investigation of Cu Electroplating with Supercritical CO2 Emulsion Using a Rotating Disk Electrode under High Pressure. Journal of The Electrochemical Society. 2020; 167 (16):162506.
Chicago/Turabian StyleKazuhito Higuchi; Tso-Fu Mark Chang; Masato Sone. 2020. "Electrochemical Investigation of Cu Electroplating with Supercritical CO2 Emulsion Using a Rotating Disk Electrode under High Pressure." Journal of The Electrochemical Society 167, no. 16: 162506.
In recent years, MEMS (microelectromechanical systems) devices are required to have high functionality and small size, especially for MEMS acceleration sensors, and sensitivity of a MEMS acceleration sensor is highly dependent on the Brownian noise [1,2]. The Brown noise is known to be inversely proportional to mass of movable parts in the sensor, and the noise is lowered by increasing the mass [1,2], which implies a number of volume is needed to ensure high sensitivity. However, increasing size of the component is not preferable. Because of this, a design of gold-based MEMS acceleration sensor is proposed. The density of gold is 19.3 g/cm3, and gold has high corrosion resistance and chemical stability. Most importantly, gold electrodeposition process can be easily integrated with current MEMS fabrication process.Mechanical properties of the material are essential informtion for design of MEMS components. For instance, the yield stress is needed to guarantee elastic deformation of the material during operation of the MEMS device. Mechanical properties of metallic materials are known to change with size of the sample used in a mechanical property characterization becomes smaller than micrometer scale, which is known as the sample size effect [3]. Therefore, mechanical property characterization of materials toward MEMS should be conducted using samples having the same dimensions as those used in MEMS. Various micro-mechanical testing methods have been developed to characterize micro-specimens, such as micro-compression test, micro-tensile test, and micro-bending test. Among them, micro-bending test is suggested to be the most suitable method to evaluate materials for applications in MEMS when compared with micro-compression and micro-tensile tests since cantilever-like structure is commonly utilized in movable components, such as the micro-spring in MEMS accelerometers. On the other hand, micro-cantilevers are reported to have the sample geometry effect [4], which the sample size effect is only observed when varying thickness of the micro-cantilever. Also, it has been reported that the sample size effect is dependent on ratio of the sample diameter to the average grain size, and materials prepared by electrodeposition are usually polycrystal. Thus, relationship between the sample geometry effect and the average grain size is investigated in this study.Two gold films were electrodeposited at different current density to change the average grain size. The average grain size was determined by electron backscatter diffraction, and the average grain size of film A and B were 1.2~1.3 and 0.6 μm, respectively. Samples used in the micro-bending test were micro-cantilevers fabricated from the gold films by focus ion beam. Thicknesses of the micro-cantilever were ranged from 6.0 to 13 μm. The micro-bending tests are conducted using a test machine specially designed for micro-specimens developed in our group as shown in Fig. 1.The yield stresses were in a range of 428 to 553MPa, which were all higher than that of the bulk gold (55 to 220 MPa). Table 1 shows the detailed dimensions and yield stress of all samples. Yield stresses were plotted against the log scale of thickness shown in Fig. 2. At first, the sample geometry effect was confirmed in samples fabricated from both film A and B. Then, the yield stresses of samples fabricated from film B were all higher than those of film A, which was a result of the Hall-Petch relationship. In Fig. 2, the slop was steeper for film A indicating the sample geometry effect was more obvious in samples composed of larger grains. [1] D. Yamane, T. Konishi, T. Matsushima, K. Machida, H. Toshiyoshi, and K. Masu, Appl Phys Lett 104 (2014) 074102[2] K. Machida, T. Konishi, D. Yamane, H. Toshiyoshi, K. Masu, ECS Trans. 61 (2014) 21-39.[3] J.R. Greer and J.Th.M. De Hosson: Plasticity in small-sized metallic systems: Intrinsic versus extrinsic size effect. Prog. Mater. Sci. 56, 654 (2011).[4] K. Suzuki, "Sample Geometry Effect on Mechanical Property of Electrodeposited Gold Evaluated by Micro-Bending Test", 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes Greece, Sep. 2019Figure 1
Kosuke Suzuki; Yu-An Chien; Ken Hashigata; Keisuke Asano; Chun-Yi Chen; Tso-Fu Mark Chang; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated By Micro-Bending Test. ECS Meeting Abstracts 2020, MA2020-02, 3306 -3306.
AMA StyleKosuke Suzuki, Yu-An Chien, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Tso-Fu Mark Chang, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated By Micro-Bending Test. ECS Meeting Abstracts. 2020; MA2020-02 (65):3306-3306.
Chicago/Turabian StyleKosuke Suzuki; Yu-An Chien; Ken Hashigata; Keisuke Asano; Chun-Yi Chen; Tso-Fu Mark Chang; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. 2020. "Effects of Sample Geometry and Grain Size on Mechanical Property of Electrodeposited Gold Evaluated By Micro-Bending Test." ECS Meeting Abstracts MA2020-02, no. 65: 3306-3306.
This study reports mechanical properties of single-crystal pure gold toward for applications as movable components in micro-electrical-mechanical system (MEMS) inertial sensors requiring high sensitivity. Gold is commonly applied in electronic devices because of the excellent corrosion resistance, chemical stability, and conductivity. Recently, MEMS inertial sensors utilizing gold materials are reported to have low Brownian noise and high sensitivity while keeping the dimensions small by taking advantage of gold's high mass density [1]. For design of electronic device, mechanical property characterization of the constituent material is essential. In general, mechanical strengths of metallic materials are governed by movement of the dislocation, and the dislocation movement is affected by the crystal orientation, grain boundaries, texture, impurities, etc. In addition to these, mechanical properties of metallic materials are affected by size of the sample used in the evaluation when the sample size is reduced to micro or sub-micro scale, which is known as the sample size effect [2]. This sample size effect would cause mechanical properties of micro-scale metallic materials to differ from those of bulk-size materials. Therefore, in order to make contribution to design of MEMS devices, the mechanical property characterization must be conducted using specimens having dimensions and deformation system alike components used in MEMS.Micro-bending test is suggested to be the most suitable micro-mechanical property characterization method toward MEMS devices since movable components in a MEMS device would experience both compressive and tensile stresses during operation. Regarding the sample size effect, the strength has a power-law relationship with cross-sectional area of the specimen [2]. In bending test, the loading direction is perpendicular to the cantilever's width direction and parallel to the thickness direction. Because of this, the width and the thickness are expected to affect the sample size effect differently. On the other hand, the dislocation movable is also highly affected by the grain boundary and eventually the sample size effect [3]. Hence, single crystalline specimen is often used to examine the sample size effect to eliminate influences from the grain boundary.In this study, micro-cantilevers composed of single-crystal pure gold were fabricated using focus ion beam (FIB). All micro-cantilevers were ensured to have the loading direction parallel to the [1-10] orientation and the neutral plane parallel to the [110] orientation. Lengths of the micro-cantilevers were fixed at 50 μm. The thicknesses and widths were varied between 5 to 15 μm. The bending test was performed using a machine specially designed for micro-specimens developed in our group as shown in Fig. 1. The strain rate was fixed at 0.125 %/sec. Fig. 2 shows scanning electron microscope (SEM) images of the 50×9.7×10.5 μm3 micro-cantilever before and after the micro-bending test. From these images, slip lines and necking were observed at the base of the cantilever where stress and deformation were concentrated after the bending test. This slip lines indicated the active slip plane according to the Schmid's law. The engineering stresses, σ, were calculated utilizing the Euler-Bernoulli beam theory [4]. The engineering strains are calculated from ratio of the d/y [5], where d is displacement of tip of the indenter. Fig. 3 shows engineering stress-engineering strain curves of the five micro-cantilevers. Yield stresses of the 6.9, 10.5, and 15.1 μm thick micro-cantilevers were 195, 175, and 128 MPa, respectively. Yield stress of the 4.7, 9.7, and 15.1μm width micro-cantilevers were 177, 175, and 183 MPa, respectively. These yield stresses were all lager than the value of bulk-size pure gold, which were results of the sample size effect. In addition, the yield stress increased as the thickness decreased, whereas it does not change much with the width reduction. This result suggested the sample size effect was only observed when changing the thickness, but not the width. These findings confirmed mechanical properties of micro-cantilevers were affected by the sample geometry, which is named as the sample geometry effect.[1] D. Yamane, T. Konishi, T. Matsushima, K. Machida, H. Toshiyoshi, and K. Masu, Appl. Phys. Lett. 104 (2014) 074102[2] J.R. Greer, W.C. Oliver, W.D. Nix, Acta. Mater. 53 (2005) 1821-1830.[3] J.R. Greer and J.Th.M. De Hosson, Prog. Mater. Sci. 56 (2011) 654-724 (2011).[4] K. Asano, T.F.M. Chang, H.C. Tang, T. Nagoshi, C.Y. Chen, D. Yamane, H. Ito, K. Machida, K. Masu, M. Sone, ECS J. Solid State Sci. Technol., 8 (2019) P412-P415.[5] E. Demir, D. Raabe, F. Roters, Acta. Mater. 58 (2010) 1876-1886.Figure 1
Kazuya Fujita; Kosuke Suzuki; Chun-Yi Chen; Tso-Fu Mark Chang; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. Effects of Sample Geometry on Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics. ECS Meeting Abstracts 2020, MA2020-02, 3307 -3307.
AMA StyleKazuya Fujita, Kosuke Suzuki, Chun-Yi Chen, Tso-Fu Mark Chang, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Effects of Sample Geometry on Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics. ECS Meeting Abstracts. 2020; MA2020-02 (65):3307-3307.
Chicago/Turabian StyleKazuya Fujita; Kosuke Suzuki; Chun-Yi Chen; Tso-Fu Mark Chang; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. 2020. "Effects of Sample Geometry on Micro-Mechanical Property of Single Crystal Gold for Applications in Microelectronics." ECS Meeting Abstracts MA2020-02, no. 65: 3307-3307.
This study reports mechanical property evaluation of electrodeposited nickel phosphorus amorphous alloys. Electrodeposited nickel materials have excellent properties such as high elastic modulus, high strength, low internal stress, and excellent conductivity, and are expected to be applied to micro-sized machines and micro electro mechanical systems [1]. An example is nickel phosphorous amorphous alloys, which are commonly used as structure materials in microelectromechanical system devices [2].Electrodeposition is a powerful technique to manipulate properties of metallic materials used in electronic devices. For example, nickel-phosphorus alloys can be prepared by electrodeposition with an electrolyte containing nickel chloride and nickel sulfate as source of the nickel, and sodium hypophosphite as source of the phosphorus [3, 4]. Properties of the electrodeposited nickel phosphorous alloy can be controlled by the bath temperature, current density, pH, sodium hypophosphite concentration, etc.In order to use the nickel phosphorus amorphous alloy as structure components in a MEMS device, it is necessary to investigate the mechanical properties using specimens having similar size as those used in a MEMS device. Hence, mechanical property characterization of electrodeposited nickel phosphorus amorphous alloys has to be conducted using specimens having dimensions in micrometer scale.Nickel phosphorus amorphous alloys were electrodeposited on pure copper plates using a commercially available electrolyte provided by MATEX Co. Japan. Thickness of the nickel phosphorous alloy was controlled to be at around 50 μm. Composition of the nickel phosphorus amorphous alloy was determined by energy dispersive X-ray spectroscopy (EDS). Specimens used in the micro-mechanical testing were micro-pillars having a square cross-section. The micro-pillars were fabricated by focus ion beam (FIB) system. Before the FIB process, the nickel phosphorus electrodeposited copper plate was thinned down to roughly 100 μm. Dimensions of the micro-pillar were 5 × 5 × 10 μm3, 8 × 8 × 16 μm3, 15 × 15 × 30 μm3, and 20 × 20 × 40 μm3. Shape of the micro-pillar was observed in a scanning electron microscope (SEM) before and after the micro-compression test to confirm the exact dimension and deformation behavior. Then micro-compression test was conducted using a micro-mechanical testing system developed in our group [1]. The yield strength was determined from the engineering stress-strain curve generated from the micro-compression test. Vickers hardness of the nickel-phosphorus amorphous alloys was also measured to compare with the yield strength obtained from the micro-compression test.Fig. 1 and 2 show SEM images of the 20 × 20 × 40 μm3 micro-pillar before and after the micro-compression test, respectively. After the compressive deformation, slip deformation, which is often seen in amorphous metals, was observed. Evolution of this slip deformation could be identified from the stress oscillation observed in the stress-strain curve shown in Fig. 3. Similar slip deformation and stress oscillation were also observed in nickel phosphorous amorphous alloy micro-pillars with other sizes. Table 1 shows the 0.2% yield strength and 1% flow strength determined from the stress-strain curves. The 0.2% yield strength fluctuated between 2.01 - 2.08 GPa and the 1% flow strength changed between 2.37 - 2.47 while the one side of the micropillar varied between 10 - 40 μm. Micro-compression test of the nickel phosphorous amorphous alloys revealed that there was no obvious relationship between size of the micro-pillar and the yield strength in the range evaluated in this study. This result was different from the sample size effect commonly observed in metallic materials with high crystallinity [5].[1] K. Takashima, Y. Higo, S. Sugiura, M Shimojo, Mater. Trans. 42 (2001) 68-73.[2] X Li, B Bhushan, K Takashima, C Bank, Y Kim. Ultramicroscopy 97 (2003) 481-494.[3] C.C. Hu, A. Bai, Surf. Coat. Techno. 137 (2001) 181-187. [4] C.C. Hu, A. Bai, Mater. Chem. Phys. 77 (2003) 215-225. [5] J.R. Greer, J.Th.M. De Hosson, Prog. Mater. Sci. 56 (2011) 654-724.Figure 1
Tokihiro Hotta; Tso-Fu Mark Chang; Masato Sone. Micro-Compression Characterization of Electrodeposited Nickel Phosphorus Amorphous Alloys for MEMS Application. ECS Meeting Abstracts 2020, MA2020-02, 3308 -3308.
AMA StyleTokihiro Hotta, Tso-Fu Mark Chang, Masato Sone. Micro-Compression Characterization of Electrodeposited Nickel Phosphorus Amorphous Alloys for MEMS Application. ECS Meeting Abstracts. 2020; MA2020-02 (65):3308-3308.
Chicago/Turabian StyleTokihiro Hotta; Tso-Fu Mark Chang; Masato Sone. 2020. "Micro-Compression Characterization of Electrodeposited Nickel Phosphorus Amorphous Alloys for MEMS Application." ECS Meeting Abstracts MA2020-02, no. 65: 3308-3308.
Nickel [1], cobalt [2], and their alloys have been investigated as important engineering materials because of their unique properties, such as magnetic, heat-conductive and high hardness. Much interest is focused on the application of Ni-Co alloy films in micro-electrical-mechanical systems (MEMS) devices especially their considerable potential in manufacturing of magnetic actuator due to excellent electrical and mechanical properties [3].Reliability of electronic components is highly dependent on the mechanical property, which is closely related to its average grain size according to grain boundary strengthening mechanism [4]. Nanocrystalline materials can offer enhanced mechanical strength compared with coarse-grained counterparts when device components are scaled to the micro-scale regime with synergistic effect of the sample size effect [5]. Meanwhile, alloying allows utilization of the solid solution strengthening mechanism to further enhance the mechanical strength [6], and Ni-Co forms a solid solution over the whole concentration range, making it easy to control the mechanical and magnetic properties.Electroplating is a promising technique in controlling crystalline properties of Ni-Co alloy films because the morphology, composition, grain size, and deposition rate of the deposited materials can be facilely controlled by varying the electroplating parameters, such as the current density, bath composition, and temperature [7]. Therefore, in this study, the effects of applied current density on average grain size, composition, and micro-mechanical properties of electrodeposited Ni-Co films are evaluated for fabrication of micro-components in electronic devices. The electroplating was carried out at 55 ℃, and the current density was varied from 5 to 20 mA/cm2. A piece of Pt plate was used as the anode. Crystalline structure of the Ni-Co films was characterized by X-ray diffraction (XRD), average grain size was determined using XRD in conjunction with the Scherrer method. Microhardness tests were conducted on a Vicker's hardness tester using a load of 0.025 kg, applied for 15 s. Composition was analysed by energy dispersive X-ray spectroscopy (EDX) system. Furthermore, alloy films are processed into micro-pillars in a size of 10×10×20 μm3with focused ion beam (FIB, FB2100, Hitachi) milling. The optical microscope photograph of Ni-Co alloy micro-pillar fabricated with current density of 18 mA/cm2 is shown in Fig. 1. A high yield stress of 1.65 GPa is determined after the micro-compression test.Vickers hardness as a function of d-1/2 for the alloy specimens is shown in the scatter plot of Fig. 2, where d is average grain size. Microhardness value has a positive linear relationship with d-1/2 approximately, which corresponds well to Hall-Petch relationship. Maximum Vicker's hardness value of 526 Hv was obtained with a current density of 10 mA/cm2, which is much higher than those of pure Ni (306 Hv) and Co (403 Hv) films prepared in this study, indicating the effect of solid solution strengthening.[1] T. Yamamoto, K. Igawa, H.C. Tang, C.Y. Chen, T.F.M. Chang, T. Nagoshi, O. Kudo, R. Maeda, M. Sone, Microelectron. Eng., 213, 18 (2019).[2] X. Luo, C.Y. Chen, T.F.M. Chang, H. Hosoda, M. Sone, J. Electrochem. Soc., 162, D423 (2015).[3] M. Duch, J. Esteve, E. Gómez, R. Pérez-Castillejos, E. Vallés,J. Micromech. Microeng., 12, 400 (2002).[4] C.Y. Chen, M. Yoshiba, T. Nagoshi, T.F.M. Chang, D. Yamane, K. Machida, K. Masu, M. Sone, Electrochem. Commun., 67, 51 (2016).[5] M. D. Uchic, D. M. Dimiduk, J. N. Florando, W. D. Nix, Science, 305, 986 (2004).[6] H. Tang, T.F.M. Chang, Y.W. Chai, C.Y. Chen, T. Nagoshi, D. Yamane, H. Ito, K. Machida, K. Masu, M. Sone, J. Electrochem. Soc., 165, D58 (2018).[7] A. Bai, C.C. Hu, Electrochimica Acta, 47, 3447 (2002).Figure 1
Yiming Jiang; Yu-An Chien; Chun-Yi Chen; Tso-Fu Mark Chang; Masato Sone. Relationship between Current Density, Crystal Grain Size, Composition and Mechanical Properties in Electrodeposited Ni-Co Alloys. ECS Meeting Abstracts 2020, MA2020-02, 1457 -1457.
AMA StyleYiming Jiang, Yu-An Chien, Chun-Yi Chen, Tso-Fu Mark Chang, Masato Sone. Relationship between Current Density, Crystal Grain Size, Composition and Mechanical Properties in Electrodeposited Ni-Co Alloys. ECS Meeting Abstracts. 2020; MA2020-02 (16):1457-1457.
Chicago/Turabian StyleYiming Jiang; Yu-An Chien; Chun-Yi Chen; Tso-Fu Mark Chang; Masato Sone. 2020. "Relationship between Current Density, Crystal Grain Size, Composition and Mechanical Properties in Electrodeposited Ni-Co Alloys." ECS Meeting Abstracts MA2020-02, no. 16: 1457-1457.
Yuki Ito; Yu-An Chien; Parthojit Chakraborty; Tso-Fu Mark Chang; Takamichi Nakamoto; Masato Sone. Polyaniline Supported Atomic Gold Electrode Toward Glucose Oxidation. ECS Meeting Abstracts 2020, MA2020-02, 1504 -1504.
AMA StyleYuki Ito, Yu-An Chien, Parthojit Chakraborty, Tso-Fu Mark Chang, Takamichi Nakamoto, Masato Sone. Polyaniline Supported Atomic Gold Electrode Toward Glucose Oxidation. ECS Meeting Abstracts. 2020; MA2020-02 (17):1504-1504.
Chicago/Turabian StyleYuki Ito; Yu-An Chien; Parthojit Chakraborty; Tso-Fu Mark Chang; Takamichi Nakamoto; Masato Sone. 2020. "Polyaniline Supported Atomic Gold Electrode Toward Glucose Oxidation." ECS Meeting Abstracts MA2020-02, no. 17: 1504-1504.
In this study, a capacitive tactile sensor (CTS) that simultaneously supports high detection sensitivity and high spatial resolution with a hollow dielectric structure is reported. By vertically stacking two capacitors with intentionally misaligned electrodes among the capacitors, not only the normal and shear force but also the shear angle can be detected. A comprehensive fabrication procedure that advanced the existing solutions was developed in addition to its theoretical design and numerical evaluation. Results indicated that the proposed hollow CTS outperformed the referential solid CTS in detection sensitivity for both the normal (on average 31.660 pF/N under 0.5 N) and shear force (at least 5.61 times enhancement under 1.5 N) applications. The results also proved comparable shear angle detection accuracy to previously existing CTS. Additionally, the periodical variation of sensitivity enhancement along the shear angle was found and analyzed for the first time, which provided design guidance for the arrangement of the electrodes in the CTS regardless of its dielectric structure.
Yu-Hao Jen; Chia-Tso Mo; Yu-Wen Chen; Emile Martincic; Daisuke Yamane; Tso-Fu Mark Chang; Masato Sone; Cheng-Yao Lo. Development and Characterization of Vertically Stacked Tactile Sensor With Hollow Structure. IEEE Sensors Journal 2020, 21, 5809 -5818.
AMA StyleYu-Hao Jen, Chia-Tso Mo, Yu-Wen Chen, Emile Martincic, Daisuke Yamane, Tso-Fu Mark Chang, Masato Sone, Cheng-Yao Lo. Development and Characterization of Vertically Stacked Tactile Sensor With Hollow Structure. IEEE Sensors Journal. 2020; 21 (5):5809-5818.
Chicago/Turabian StyleYu-Hao Jen; Chia-Tso Mo; Yu-Wen Chen; Emile Martincic; Daisuke Yamane; Tso-Fu Mark Chang; Masato Sone; Cheng-Yao Lo. 2020. "Development and Characterization of Vertically Stacked Tactile Sensor With Hollow Structure." IEEE Sensors Journal 21, no. 5: 5809-5818.
Atomic-level gold clusters are decorated on a polyaniline (PANI) support by a cyclic atomic electrodeposition process, and the catalytic activity in the oxidation of glucose is studied. The evaluation is conducted by cyclic voltammetry using atomic-level gold clusters-decorated PANI (PANI/AuN, where N indicates the atomic size of the Au cluster and N = 1~3 in this study) as the working electrode and a solution containing 0 to 50.0 mM of glucose in phosphate-buffered saline. The catalytic activity is determined from the oxidation current observed at around +0.6 V vs. Ag/AgCl. The catalytic activity is found to be affected by the size of gold clusters decorated on the PANI/AuN, whereby the catalytic activity is low when N is 1 or 3. On the other hand, an obvious enhancement in the catalytic activity is observed for the PANI/Au2 electrode.
Yuki Ito; Tso-Fu Mark Chang; Yu-An Chien; Chun-Yi Chen; Parthojit Chakraborty; Takamichi Nakamoto; Masato Sone. Catalytic Activity of Atomic Gold-Decorated Polyaniline Support in Glucose Oxidation. Electrochem 2020, 1, 394 -399.
AMA StyleYuki Ito, Tso-Fu Mark Chang, Yu-An Chien, Chun-Yi Chen, Parthojit Chakraborty, Takamichi Nakamoto, Masato Sone. Catalytic Activity of Atomic Gold-Decorated Polyaniline Support in Glucose Oxidation. Electrochem. 2020; 1 (4):394-399.
Chicago/Turabian StyleYuki Ito; Tso-Fu Mark Chang; Yu-An Chien; Chun-Yi Chen; Parthojit Chakraborty; Takamichi Nakamoto; Masato Sone. 2020. "Catalytic Activity of Atomic Gold-Decorated Polyaniline Support in Glucose Oxidation." Electrochem 1, no. 4: 394-399.
Strengthening of electrodeposited Au-based materials is achieved by co-electrodeposition with TiO2 nanoparticles dispersed in a sulfide-based gold electrolyte. TiO2 content in the composite film is adjusted by concentration of the TiO2 in the gold electrolyte. Effects of the TiO2 content on surface morphology, crystalline structure and microstructure of the composite film are investigated. Mechanical properties of the Au–TiO2 composite films are evaluated by micro-Vickers hardness and micro-compression tests. The hardness increases from 135 to 207 HV when the TiO2 content is increased from 0 to 2.72 wt%. Specimens used in the micro-compression test are micro-pillars fabricated from the composite film, and the yield strength reaches 0.84 GPa by incorporating 2.72 wt% TiO2 into the film.
Yu-An Chien; Tso-Fu Mark Chang; Chun-Yi Chen; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. Co-Electrodeposition of Au–TiO2 Nanocomposite and the Micro-Mechanical Properties. Electrochem 2020, 1, 388 -393.
AMA StyleYu-An Chien, Tso-Fu Mark Chang, Chun-Yi Chen, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Co-Electrodeposition of Au–TiO2 Nanocomposite and the Micro-Mechanical Properties. Electrochem. 2020; 1 (4):388-393.
Chicago/Turabian StyleYu-An Chien; Tso-Fu Mark Chang; Chun-Yi Chen; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. 2020. "Co-Electrodeposition of Au–TiO2 Nanocomposite and the Micro-Mechanical Properties." Electrochem 1, no. 4: 388-393.
Sample geometry effects on mechanical strengths of gold micro-cantilevers are evaluated by a micro-bending test. Six micro-cantilevers with the same length of 50 μm are prepared, and the width and the thickness are varied to examine individual effects on the yield stress. The yield stress increases from 428 to 519 MPa when the thickness decreases from 11.1 to 6.0 μm. No obvious dependency is observed when varying the width. The results reveal that the thickness and the width each has a different influence on the yield stresses of micro-cantilevers evaluated by the bending test, which is the sample geometry effect.
Kosuke Suzuki; Tso-Fu Mark Chang; Ken Hashigata; Keisuke Asano; Chun-Yi Chen; Takashi Nagoshi; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test. MRS Communications 2020, 10, 434 -438.
AMA StyleKosuke Suzuki, Tso-Fu Mark Chang, Ken Hashigata, Keisuke Asano, Chun-Yi Chen, Takashi Nagoshi, Daisuke Yamane, Hiroyuki Ito, Katsuyuki Machida, Kazuya Masu, Masato Sone. Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test. MRS Communications. 2020; 10 (3):434-438.
Chicago/Turabian StyleKosuke Suzuki; Tso-Fu Mark Chang; Ken Hashigata; Keisuke Asano; Chun-Yi Chen; Takashi Nagoshi; Daisuke Yamane; Hiroyuki Ito; Katsuyuki Machida; Kazuya Masu; Masato Sone. 2020. "Sample geometry effect on mechanical property of gold micro-cantilevers by micro-bending test." MRS Communications 10, no. 3: 434-438.
A facile, environmentally benign antisolvent method has been developed to prepare for reduced graphene oxides (RGO)-wrapped ZnO nanocrystals with controlled RGO contents. Because of the high electrical conductivity of RGO, the photogenerated electrons at ZnO mostly transported to RGO, leaving positively charged photoexcited holes in ZnO to result in charge separation. The steady-state photoluminescence, time-resolved photoluminescence spectroscopy and photovoltage decay analysis were employed to investigate charge carrier dynamics and charge transfer behaviors of RGO-ZnO. The influence of RGO content on the charge dynamics and photoconversion efficiency of RGO-ZnO toward dye degradation and water splitting has been realized.
Wei-Chen Hu; Yi-An Chen; Ping-Yen Hsieh; Chun-Wen Tsao; Yi-Hsuan Chiu; Tso-Fu Mark Chang; Chun-Yi Chen; Masato Sone; Yung-Jung Hsu. Reduced graphene oxides-wrapped ZnO with notable photocatalytic property. Journal of the Taiwan Institute of Chemical Engineers 2020, 112, 337 -344.
AMA StyleWei-Chen Hu, Yi-An Chen, Ping-Yen Hsieh, Chun-Wen Tsao, Yi-Hsuan Chiu, Tso-Fu Mark Chang, Chun-Yi Chen, Masato Sone, Yung-Jung Hsu. Reduced graphene oxides-wrapped ZnO with notable photocatalytic property. Journal of the Taiwan Institute of Chemical Engineers. 2020; 112 ():337-344.
Chicago/Turabian StyleWei-Chen Hu; Yi-An Chen; Ping-Yen Hsieh; Chun-Wen Tsao; Yi-Hsuan Chiu; Tso-Fu Mark Chang; Chun-Yi Chen; Masato Sone; Yung-Jung Hsu. 2020. "Reduced graphene oxides-wrapped ZnO with notable photocatalytic property." Journal of the Taiwan Institute of Chemical Engineers 112, no. : 337-344.
Novel sensing materials have been formed by decorating polyaniline conducting polymers with atomic gold clusters where the number of atoms is precisely defined. Such materials exhibit unique electrocatalytic properties of electrooxidation to aliphatic alcohols, although analytes with other functional groups have not been studied. This paper reports a study of cyclic voltammetric patterns obtained with bi-atomic gold nanocomposite response to analytes with other functional groups for sensor applications. Principal component analysis shows separation among normal-propanol, iso-propanol and ethyl formate/ethanol groups. Indirect sensing of ethyl formate is demonstrated by electrooxidation of the product upon hydrolysis in alkaline medium. Voltammograms of ethyl formate are studied in gaseous phases.
Parthojit Chakraborty; Yu-An Chien; Tso-Fu Mark Chang; Masato Sone; Takamichi Nakamoto. Indirect Sensing of Lower Aliphatic Ester Using Atomic Gold Decorated Polyaniline Electrode. Sensors 2020, 20, 3640 .
AMA StyleParthojit Chakraborty, Yu-An Chien, Tso-Fu Mark Chang, Masato Sone, Takamichi Nakamoto. Indirect Sensing of Lower Aliphatic Ester Using Atomic Gold Decorated Polyaniline Electrode. Sensors. 2020; 20 (13):3640.
Chicago/Turabian StyleParthojit Chakraborty; Yu-An Chien; Tso-Fu Mark Chang; Masato Sone; Takamichi Nakamoto. 2020. "Indirect Sensing of Lower Aliphatic Ester Using Atomic Gold Decorated Polyaniline Electrode." Sensors 20, no. 13: 3640.
Rapid advancements in information processing and embedded systems require high selective and fast sensors. Conventional gas sensors are not suitable for the detection of isomers of organic compounds due to cross-sensitivity and the response time being limited by slow chemical kinetics. Amperometric gas sensors using conducting polymers modified with metal catalysts are a suitable and robust system due to many tunable properties. In this paper, conducting polymer polyaniline was electrochemically decorated with clusters containing precisely defined number of gold atoms to function as an electro-catalyst. The modified polymer composite showed fast reaction rate for the electro-oxidation of alcohols in both liquid and gas phases. The number of gold atoms affected the catalytic activity. Cyclic voltammograms were measured and results showed discriminable patterns between n-propanol and iso-propanol even at different gas concentrations. Thus, it was demonstrated that gas sensor arrays can be realized by decorating different number of gold atoms on polyaniline electrodes, to yield defined and different selectivity.
Parthojit Chakraborty; Yu-An Chien; Wan-Ting Chiu; Tso-Fu Mark Chang; Masato Sone; Takamichi Nakamoto; Mira Josowicz; Jiri Janata. Design and Development of Amperometric Gas Sensor With Atomic Au–Polyaniline/Pt Composite. IEEE Sensors Journal 2020, 20, 12479 -12487.
AMA StyleParthojit Chakraborty, Yu-An Chien, Wan-Ting Chiu, Tso-Fu Mark Chang, Masato Sone, Takamichi Nakamoto, Mira Josowicz, Jiri Janata. Design and Development of Amperometric Gas Sensor With Atomic Au–Polyaniline/Pt Composite. IEEE Sensors Journal. 2020; 20 (21):12479-12487.
Chicago/Turabian StyleParthojit Chakraborty; Yu-An Chien; Wan-Ting Chiu; Tso-Fu Mark Chang; Masato Sone; Takamichi Nakamoto; Mira Josowicz; Jiri Janata. 2020. "Design and Development of Amperometric Gas Sensor With Atomic Au–Polyaniline/Pt Composite." IEEE Sensors Journal 20, no. 21: 12479-12487.