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Tianmin Shao
State Key Laboratory of Tribology, Tsinghua University, Beijing 100084, China

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Journal article
Published: 21 July 2021 in Applied Surface Science
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The effect of laser treatment on the tribological performance of PEEK under seawater lubrication was studied. The surface morphology and wettability of the laser treated PEEK were analyzed. The relationship between the surface chemical composition and the tribological performance of the laser treated PEEK was discussed. Results show that oxidation occurred during laser treatment with relatively low laser power density, there was no obvious change in surface roughness. Carbonization occurred for the treatment with high laser power density, surface roughness increased significantly, made the surface more hydrophobic. The friction of PEEK under artificial seawater lubrication was reduced after laser treatment. The reduction in friction for the laser treated PEEK under low power density was mainly due to the adsorption of water molecules and cations on the surface of PEEK. For the PEEK treated with high laser power density, solid lubrication due to surface carbonization was the main reason for the reduction of friction and wear.

ACS Style

Bingxue Cheng; Haitao Duan; Qin Chen; Hongfei Shang; Yang Zhang; Jian Li; Tianmin Shao. Effect of laser treatment on the tribological performance of polyetheretherketone (PEEK) under seawater lubrication. Applied Surface Science 2021, 566, 150668 .

AMA Style

Bingxue Cheng, Haitao Duan, Qin Chen, Hongfei Shang, Yang Zhang, Jian Li, Tianmin Shao. Effect of laser treatment on the tribological performance of polyetheretherketone (PEEK) under seawater lubrication. Applied Surface Science. 2021; 566 ():150668.

Chicago/Turabian Style

Bingxue Cheng; Haitao Duan; Qin Chen; Hongfei Shang; Yang Zhang; Jian Li; Tianmin Shao. 2021. "Effect of laser treatment on the tribological performance of polyetheretherketone (PEEK) under seawater lubrication." Applied Surface Science 566, no. : 150668.

Journal article
Published: 11 March 2021 in Wear
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Effects of thermal aging on the blend phase morphology of polyimide/ultrahigh molecular weight polyethylene (PI/UHMWPE) blend composites were studied by using Raman Mapping. Friction and wear tests were conducted to study the influence of thermal aging on the tribological properties of the blend composites. The results indicate that the phase morphology of PI/UHMWPE blend composites could be controlled by thermal aging. At relatively low thermal aging temperatures (100 °C, 120 °C), the blend with high PI/UHMWPE ratio tended to form continuous layered structures. As a consequence, the tribological performance was significantly improved. While for the blend with low PI/UHMWPE ratio, the improvement of tribological performance was not significant. For the blends thermal aged at relatively high temperature (150 °C), the tribological performance was poor due to significant phase separation that occurred after thermal aging.

ACS Style

Bingxue Cheng; Haitao Duan; Song Chen; Hongfei Shang; Jian Li; Tianmin Shao. Effects of thermal aging on the blend phase morphology and tribological performance of PI/UHMWPE blend composites. Wear 2021, 203840 .

AMA Style

Bingxue Cheng, Haitao Duan, Song Chen, Hongfei Shang, Jian Li, Tianmin Shao. Effects of thermal aging on the blend phase morphology and tribological performance of PI/UHMWPE blend composites. Wear. 2021; ():203840.

Chicago/Turabian Style

Bingxue Cheng; Haitao Duan; Song Chen; Hongfei Shang; Jian Li; Tianmin Shao. 2021. "Effects of thermal aging on the blend phase morphology and tribological performance of PI/UHMWPE blend composites." Wear , no. : 203840.

Journal article
Published: 20 February 2021 in Wear
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A tribo-oxide layer is generally formed on the contact surfaces during the high temperature friction and wear process, which significantly influences the tribological properties of the materials. In this work, the evolution mechanism of the tribo-oxide layer for nickel-based superalloy was studied. High temperature sliding wear tests were performed at the different sliding time from 1 min to 60 min for nickel-based superalloy (Ni–16Cr–13Co–4Mo) against a Si3N4 ball at 800 °C under ambient environment. Morphology and chemical composition of the worn surface and wear debris were investigated using a Scanning electron microscope (SEM), X-Ray diffraction (XRD) and Raman spectroscope. The cross-sectional microstructure and element distribution of the worn surface and unworn surface were characterized by EDS mapping attached to the SEM. Results show that the evolution of the tribo-oxide layer can be divided into three stages. The first stage was characterized by the formation of a mixed oxide layer due to the preferential oxidation of Cr, Al and Ti in the preheating and temperature holding process. In the second stage, a dense tribo-oxide layer was formed by compacting and sintering the wear debris retained on the worn surface. Meanwhile, the inner oxidation of Cr and the dissolution and oxidation of the γ′ phase in the alloy occurred. In the third stage, the oxide layer with a layered structure formed with an outmost layer composed of mixed oxides with a spinel structure and an inner oxide layer played a barrier role to prevent further oxidation of the substrate. It is speculated that the change in the structure of spinel oxides at high temperature from order to disorder led to the decrease in shear stress, eventually resulted in the reduction of friction coefficient and the low wear rate.

ACS Style

Kaili Feng; Tianmin Shao. The evolution mechanism of tribo-oxide layer during high temperature dry sliding wear for nickel-based superalloy. Wear 2021, 203747 .

AMA Style

Kaili Feng, Tianmin Shao. The evolution mechanism of tribo-oxide layer during high temperature dry sliding wear for nickel-based superalloy. Wear. 2021; ():203747.

Chicago/Turabian Style

Kaili Feng; Tianmin Shao. 2021. "The evolution mechanism of tribo-oxide layer during high temperature dry sliding wear for nickel-based superalloy." Wear , no. : 203747.

Journal article
Published: 30 October 2020 in Coatings
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A simulation of magnetic-field-induced ion motion in vacuum arc deposition for the inner surfaces of a tubular workpiece was performed. An auxiliary magnetic field was set to guide the motion of ions inside a pipe, with different magnetic flux densities and ion emission parameters. The results showed the trajectories, deposition ratio and depth of the ions can be controlled via a magnetic field. Within a certain range, the deposition ratio of the ions increases with magnetic flux density. When the magnetic flux density reached a certain value, both the trajectories and deposition ratio of the ions exhibited an obvious periodicity. The depth at which the ions were deposited decreased as an exponential function of the magnetic flux density and ion emission radius, respectively. With an increase in the emission angle, the deposition depth decreased linearly. A numerical model was proposed to express the distribution of the deposition depth. In addition, the deposition ratio and depth are improved with a magnetic field in an environment with a certain density of neutral gas.

ACS Style

Tiancheng Wang; Yulei Yang; Tianmin Shao; Bingxue Cheng; Qian Zhao; Hongfei Shang. Simulation of Magnetic-Field-Induced Ion Motion in Vacuum Arc Deposition for Inner Surfaces of Tubular Workpiece. Coatings 2020, 10, 1053 .

AMA Style

Tiancheng Wang, Yulei Yang, Tianmin Shao, Bingxue Cheng, Qian Zhao, Hongfei Shang. Simulation of Magnetic-Field-Induced Ion Motion in Vacuum Arc Deposition for Inner Surfaces of Tubular Workpiece. Coatings. 2020; 10 (11):1053.

Chicago/Turabian Style

Tiancheng Wang; Yulei Yang; Tianmin Shao; Bingxue Cheng; Qian Zhao; Hongfei Shang. 2020. "Simulation of Magnetic-Field-Induced Ion Motion in Vacuum Arc Deposition for Inner Surfaces of Tubular Workpiece." Coatings 10, no. 11: 1053.

Journal article
Published: 16 October 2020 in Tribology International
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Fretting wear evolution of γ-TiAl alloy was investigated. Evolution of wear scar, tribolayer and wear debris were studied using optical microscope and scanning electron microscope. The results show that the wear debris generated from γ-TiAl alloy can be compacted to form a tribolayer rapidly after 100 fretting cycles. At the starting stage, the rapid formation and rupture of tribolayer alternatively occur due to insufficient thickness of the tribolayer. With the proceeding of fretting, the thickness of tribolayer increases due to increase in the amount of the wear debris, which makes the tribolayer more stable. The evolution of the wear debris and the formation of tribolayer significantly influence the fretting wear behavior of γ-TiAl alloy. The wear rate of γ-TiAl alloy decreases rapidly from 255.6 × 10−3μm3 /(N·μm) after 2000 fretting cycles to 35.5 × 10−3μm3 /(N·μm) after 10,000 fretting cycles when a thick tribolayer is formed. A physical model was proposed to describe the evolution process of the fretting wear of γ-TiAl alloy.

ACS Style

Yulei Yang; Changliang Wang; Yangzhen Gesang; Hongfei Shang; Rong Wang; Yimai Liang; Tiancheng Wang; Qin Chen; Tianmin Shao. Fretting wear evolution of γ-TiAl alloy. Tribology International 2020, 154, 106721 .

AMA Style

Yulei Yang, Changliang Wang, Yangzhen Gesang, Hongfei Shang, Rong Wang, Yimai Liang, Tiancheng Wang, Qin Chen, Tianmin Shao. Fretting wear evolution of γ-TiAl alloy. Tribology International. 2020; 154 ():106721.

Chicago/Turabian Style

Yulei Yang; Changliang Wang; Yangzhen Gesang; Hongfei Shang; Rong Wang; Yimai Liang; Tiancheng Wang; Qin Chen; Tianmin Shao. 2020. "Fretting wear evolution of γ-TiAl alloy." Tribology International 154, no. : 106721.

Journal article
Published: 08 June 2020 in Polymer
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Polyimide/ultrahigh molecular weight polyethylene (PI/UHMWPE) blends with different mass ratio were produced. A ratio-image method was adopted by plotting the ratio of Raman peak intensity of a typical band of PI with that of UHMWPE as a function of position, Raman Mapping images with a relatively high accuracy and enhanced visualization were obtained. Two-phase distribution morphologies of the blends were studied using Raman Mapping. Effects of blend phase morphology and phase distribution on the tribological properties of blend composites were investigated. The results indicated that both the phase structures and their distribution are obviously different for the PI/UHMWPE blends with different mass ratios, which significantly influence the tribological properties of the blends. PI phase disperses in an island form in the UHMWPE matrix phase when the mass ratio of PI/UHMWPE is relatively small (10/90). The scattered PI dispersed phase effectively reduces the friction coefficient of the blend and improves the wear resistance. For the PI/UHMWPE blend composite with the mass ratio of 30/70, layered PI phase forms and distributes in the UHMWPE matrix phase, improving bearing capacity and wear resistance of the blends. Large continuous area structure and phase separation occurs in the blend when the mass ratio of PI/UHMWPE increases to 50/50, resulting in a significant reduction in the wear resistance of the blend composite.

ACS Style

Bingxue Cheng; Haitao Duan; Song Chen; Hongfei Shang; Jian Li; Tianmin Shao. Phase morphology and tribological properties of PI/UHMWPE blend composites. Polymer 2020, 202, 122658 .

AMA Style

Bingxue Cheng, Haitao Duan, Song Chen, Hongfei Shang, Jian Li, Tianmin Shao. Phase morphology and tribological properties of PI/UHMWPE blend composites. Polymer. 2020; 202 ():122658.

Chicago/Turabian Style

Bingxue Cheng; Haitao Duan; Song Chen; Hongfei Shang; Jian Li; Tianmin Shao. 2020. "Phase morphology and tribological properties of PI/UHMWPE blend composites." Polymer 202, no. : 122658.

Journal article
Published: 25 February 2019 in Surface and Coatings Technology
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TiAlN coatings were deposited on stainless steel surfaces with patterns consisting of either wide stripes, narrow stripes or triangular regions. The tribological behavior of these patterned coatings was compared against that of a non-patterned reference in tests which involved rubbing against Al2O3 coated rings at room temperature (RT, ~25), 300, 450 and 600 °C. Results show that patterns can help dissipate frictional heat to decrease surface temperature and the tribo-oxidation degree, thus maintaining the load bearing capacity of the coating and retarding the material softening process. This effect, along with the decreased contact area resulting from the patterning, causes a reduction in adhesive wear. An additional benefit of the patterned surfaces is the accommodation of wear debris to reduce three-body abrasive wear. The lubricious TiO2 formed on the worn surface can also decrease the adhesion and reduce the coefficient of friction, while Al2O3 can protect the coating and reduce wear. This all suggests that, TiAlN patterned coatings are an effective means to reduce adhesive and abrasive wear of sliding components in the engine and other bearing contracts operating at elevated temperatures.

ACS Style

Zhe Geng; Gaolian Shi; Tianmin Shao; Yang Liu; Deli Duan; Tom Reddyhoff. Tribological behavior of patterned TiAlN coatings at elevated temperatures. Surface and Coatings Technology 2019, 364, 99 -114.

AMA Style

Zhe Geng, Gaolian Shi, Tianmin Shao, Yang Liu, Deli Duan, Tom Reddyhoff. Tribological behavior of patterned TiAlN coatings at elevated temperatures. Surface and Coatings Technology. 2019; 364 ():99-114.

Chicago/Turabian Style

Zhe Geng; Gaolian Shi; Tianmin Shao; Yang Liu; Deli Duan; Tom Reddyhoff. 2019. "Tribological behavior of patterned TiAlN coatings at elevated temperatures." Surface and Coatings Technology 364, no. : 99-114.

Journals
Published: 20 October 2017 in Physical Chemistry Chemical Physics
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Water plays an important role in the bipolar charge transfer generated by triboelectrification.

ACS Style

Shi-Quan Lin; Tian-Min Shao. Bipolar charge transfer induced by water: experimental and first-principles studies. Physical Chemistry Chemical Physics 2017, 19, 29418 -29423.

AMA Style

Shi-Quan Lin, Tian-Min Shao. Bipolar charge transfer induced by water: experimental and first-principles studies. Physical Chemistry Chemical Physics. 2017; 19 (43):29418-29423.

Chicago/Turabian Style

Shi-Quan Lin; Tian-Min Shao. 2017. "Bipolar charge transfer induced by water: experimental and first-principles studies." Physical Chemistry Chemical Physics 19, no. 43: 29418-29423.

Journal article
Published: 19 October 2017 in Materials
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M50 bearing steels were alternately implanted with Ti+ and N+ ions using solid and gas ion sources of implantation system, respectively. N-implantation was carried out at an energy of about 80 keV and a fluence of 2 × 1017 ions/cm2, and Ti-implantation at an energy of about 40–90 keV and a fluence of 2 × 1017 ions/cm2. The microstructures of modification layers were analyzed by grazing-incidence X-ray diffraction, auger electron spectroscopy, X-ray photoelectron spectroscopy, and transmission electron microscopy. The results showed that the gradient structure was formed under the M50 bearing steel subsurface, along the ion implantation influence zone composed of amorphous, nanocrystalline, and gradient-refinement phases. A layer of precipitation compounds like TiN is formed. In addition, nano-indentation hardness and tribological properties of the gradient structure subsurface were examined using a nano-indenter and a friction and wear tester. The nano-indentation hardness of N + Ti-co-implanted sample is above 12 GPa, ~1.3 times than that of pristine samples. The friction coefficient is smaller than 0.2, which is 22.2% of that of pristine samples. The synergism between precipitation-phase strengthening and gradient microstructure is the main mechanism for improving the mechanical properties of M50 materials.

ACS Style

Jin Jie; Tianmin Shao. Graded Microstructure and Mechanical Performance of Ti/N-Implanted M50 Steel with Polyenergy. Materials 2017, 10, 1204 .

AMA Style

Jin Jie, Tianmin Shao. Graded Microstructure and Mechanical Performance of Ti/N-Implanted M50 Steel with Polyenergy. Materials. 2017; 10 (10):1204.

Chicago/Turabian Style

Jin Jie; Tianmin Shao. 2017. "Graded Microstructure and Mechanical Performance of Ti/N-Implanted M50 Steel with Polyenergy." Materials 10, no. 10: 1204.

Journal article
Published: 01 July 2017 in AIP Advances
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ACS Style

Shi-Quan Lin; Tian-Min Shao. Charge erasure analysis on the nanoscale using Kelvin probe force microscopy. AIP Advances 2017, 7, 075104 .

AMA Style

Shi-Quan Lin, Tian-Min Shao. Charge erasure analysis on the nanoscale using Kelvin probe force microscopy. AIP Advances. 2017; 7 (7):075104.

Chicago/Turabian Style

Shi-Quan Lin; Tian-Min Shao. 2017. "Charge erasure analysis on the nanoscale using Kelvin probe force microscopy." AIP Advances 7, no. 7: 075104.

Journal article
Published: 01 October 2016 in Surface and Coatings Technology
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ACS Style

Shujun Zhou; Wei Wu; Tianmin Shao. Effect of post deposition annealing on residual stress stability of gold films. Surface and Coatings Technology 2016, 304, 222 -227.

AMA Style

Shujun Zhou, Wei Wu, Tianmin Shao. Effect of post deposition annealing on residual stress stability of gold films. Surface and Coatings Technology. 2016; 304 ():222-227.

Chicago/Turabian Style

Shujun Zhou; Wei Wu; Tianmin Shao. 2016. "Effect of post deposition annealing on residual stress stability of gold films." Surface and Coatings Technology 304, no. : 222-227.

Journal article
Published: 01 December 2015 in Surface and Coatings Technology
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Stripe patterned Ti0.6Al0.4N thin coatings were prepared by masked deposition. Surface morphology, microstructure and nanohardness of the coatings were characterized and their tribological behavior under the dry friction condition was studied. Effects of the surface patterning on the coating microstructure and tribological behavior were investigated. Results show that the surface patterning of coatings favored the spinodal decomposition of the metastable (Ti,Al)N phase into the Ti- and Al-rich (Ti,Al)N phases because the space between the coating stripes could relieve the coherency strain energy. And as a consequence, the preferred orientation was changed from (200) for the full coating to (111) for the patterned coatings. The grain size of the patterned coatings decreased, which might be due to the low deposition temperature caused by the reduced coating area which suffered the bombardment of the ions. The changes in microstructure resulted in the slight increase of the nanohardness of the patterned coatings. Both the frictional coefficient and wear volume of the patterned coatings were lower than those of the full coating and decreased as the distance between the coating stripes increased. The improved tribological behavior of the surface patterned coatings is related to the modification of coating microstructure and the effect of surface patterns.

ACS Style

Zhe Geng; Tianmin Shao. Microstructure and tribological behavior of stripe patterned Ti0.6Al0.4N thin coatings prepared by masked deposition. Surface and Coatings Technology 2015, 283, 364 -372.

AMA Style

Zhe Geng, Tianmin Shao. Microstructure and tribological behavior of stripe patterned Ti0.6Al0.4N thin coatings prepared by masked deposition. Surface and Coatings Technology. 2015; 283 ():364-372.

Chicago/Turabian Style

Zhe Geng; Tianmin Shao. 2015. "Microstructure and tribological behavior of stripe patterned Ti0.6Al0.4N thin coatings prepared by masked deposition." Surface and Coatings Technology 283, no. : 364-372.

Journal article
Published: 01 October 2015 in Vacuum
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ACS Style

Shujun Zhou; Zhongdong Ji; Tianmin Shao. Residual stress evolution during long-term and cyclic aging and annealing of gold films deposited by electron beam evaporation. Vacuum 2015, 120, 132 -138.

AMA Style

Shujun Zhou, Zhongdong Ji, Tianmin Shao. Residual stress evolution during long-term and cyclic aging and annealing of gold films deposited by electron beam evaporation. Vacuum. 2015; 120 ():132-138.

Chicago/Turabian Style

Shujun Zhou; Zhongdong Ji; Tianmin Shao. 2015. "Residual stress evolution during long-term and cyclic aging and annealing of gold films deposited by electron beam evaporation." Vacuum 120, no. : 132-138.

Journal article
Published: 01 September 2015 in Wear
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ACS Style

Xiao Huang; Izhak Etsion; Tianmin Shao. Indentation pop-in as a potential characterization of weakening effect in coating/substrate systems. Wear 2015, 338-339, 325 -331.

AMA Style

Xiao Huang, Izhak Etsion, Tianmin Shao. Indentation pop-in as a potential characterization of weakening effect in coating/substrate systems. Wear. 2015; 338-339 ():325-331.

Chicago/Turabian Style

Xiao Huang; Izhak Etsion; Tianmin Shao. 2015. "Indentation pop-in as a potential characterization of weakening effect in coating/substrate systems." Wear 338-339, no. : 325-331.

Journal article
Published: 01 September 2015 in Wear
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ACS Style

Xiao Huang; Izhak Etsion; Tianmin Shao. Effects of elastic modulus mismatch between coating and substrate on the friction and wear properties of TiN and TiAlN coating systems. Wear 2015, 338-339, 54 -61.

AMA Style

Xiao Huang, Izhak Etsion, Tianmin Shao. Effects of elastic modulus mismatch between coating and substrate on the friction and wear properties of TiN and TiAlN coating systems. Wear. 2015; 338-339 ():54-61.

Chicago/Turabian Style

Xiao Huang; Izhak Etsion; Tianmin Shao. 2015. "Effects of elastic modulus mismatch between coating and substrate on the friction and wear properties of TiN and TiAlN coating systems." Wear 338-339, no. : 54-61.

Journal article
Published: 26 August 2015 in Science China Technological Sciences
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Parallel groove surface textures with different area densities were fabricated on ASTM 1045 steel. Friction tests were conducted under dry sliding condition. Temperature rise, friction coefficient and wear of both the textured and untextured specimens were studied. An embedded K-type thermocouple beneath the friction surfaces was employed to measure frictional temperature rise. The results indicated that the temperature rise of the textured specimen was obviously reduced compared with that of the untextured specimen, although the difference between the friction coefficients was not significant. The specimen with high texture density exhibited a small temperature rise. The difference in temperature rise between the specimens with different texture densities can be primarily attributed to differences in heat dissipation and energy allocation between the tribo-pairs caused by the textured structure. The energy consumed by wear and plastic deformation was small in comparison with the total energy input by friction, thus, the influence of these factors on temperature rise can be considered to be negligible.

ACS Style

Wei Wu; Tianmin Shao; Guiming Chen. Influence of groove surface texture on temperature rise under dry sliding friction. Science China Technological Sciences 2015, 59, 183 -190.

AMA Style

Wei Wu, Tianmin Shao, Guiming Chen. Influence of groove surface texture on temperature rise under dry sliding friction. Science China Technological Sciences. 2015; 59 (2):183-190.

Chicago/Turabian Style

Wei Wu; Tianmin Shao; Guiming Chen. 2015. "Influence of groove surface texture on temperature rise under dry sliding friction." Science China Technological Sciences 59, no. 2: 183-190.

Journal article
Published: 24 July 2015 in Science China Technological Sciences
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TiAlSiN nano-composite coatings with Silicon contents from 4.1 to 23.9 at.% were deposited on Silicon wafers. The nanohardness, microstructure, and adhesion force of the coatings were deeply affected by Silicon contents. The TiAlSiN with 9.0 at.% Silicon has a maximum hardness of 40.9 GPa, a highest adhesion force of 67 N and a lowest friction coefficient of 0.5. Microstructures show that Silicon doping increases the hardness of coating due to solid solution hardening effect and grain boundary enhancement effect. The amorphous Si3N4 matrix, which contains (Ti,Al)N nano-crystals, is formed as the Silicon content is increased. The matrix contributes to the nano-hardness and helps to resist surface oxidization. Especially, the matrix induces low surface roughness and decreases the friction coefficient.

ACS Style

Kang Su; Dameng Liu; Tianmin Shao. Microstructure and mechanical properties of TiAlSiN nano-composite coatings deposited by ion beam assisted deposition. Science China Technological Sciences 2015, 58, 1682 -1688.

AMA Style

Kang Su, Dameng Liu, Tianmin Shao. Microstructure and mechanical properties of TiAlSiN nano-composite coatings deposited by ion beam assisted deposition. Science China Technological Sciences. 2015; 58 (10):1682-1688.

Chicago/Turabian Style

Kang Su; Dameng Liu; Tianmin Shao. 2015. "Microstructure and mechanical properties of TiAlSiN nano-composite coatings deposited by ion beam assisted deposition." Science China Technological Sciences 58, no. 10: 1682-1688.

Journal article
Published: 18 June 2015 in Journal of Micromechanics and Microengineering
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We report a microfabrication technique on micrometer to submicrometer scales using optical fiber enhanced irradiation. Micro quartz fibers with diameters of less than 5 μm were prepared and used as the focusing unit. Micro grooves with widths of microns and submicrons were fabricated. The influence of processing parameters such as fiber diameter, laser pulse energy and laser wavelength on groove features was studied. Finite difference time domain (FDTD) solutions were used to simulate the fiber optical field. Comparison between the results of simulation and experiment were made and discussed.

ACS Style

Jiachen Liu; Dameng Liu; Tianmin Shao. Fabrication of micro grooves on silicon by micro optical fiber enhanced pulse laser irradiation. Journal of Micromechanics and Microengineering 2015, 25, 075021 .

AMA Style

Jiachen Liu, Dameng Liu, Tianmin Shao. Fabrication of micro grooves on silicon by micro optical fiber enhanced pulse laser irradiation. Journal of Micromechanics and Microengineering. 2015; 25 (7):075021.

Chicago/Turabian Style

Jiachen Liu; Dameng Liu; Tianmin Shao. 2015. "Fabrication of micro grooves on silicon by micro optical fiber enhanced pulse laser irradiation." Journal of Micromechanics and Microengineering 25, no. 7: 075021.

Journal article
Published: 01 August 2014 in Surface and Coatings Technology
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ACS Style

Jun Xu; Tianmin Shao; Rong Zhu. Study of SiNx films used as protective layer on Ni film flow sensors. Surface and Coatings Technology 2014, 253, 38 -43.

AMA Style

Jun Xu, Tianmin Shao, Rong Zhu. Study of SiNx films used as protective layer on Ni film flow sensors. Surface and Coatings Technology. 2014; 253 ():38-43.

Chicago/Turabian Style

Jun Xu; Tianmin Shao; Rong Zhu. 2014. "Study of SiNx films used as protective layer on Ni film flow sensors." Surface and Coatings Technology 253, no. : 38-43.

Research article
Published: 28 January 2014 in Advances in Materials Science and Engineering
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TiN/Ta multilayer film with a modulation period of 5.6 nm and modulation ratio of 1 : 1 was produced by ion beam assisted deposition. Microstructure of the as-deposited TiN/Ta multilayer film was observed by transmission electron microscopy and mechanical properties were investigated. Residual stress in the TiN/Ta multilayer film was about 72% of that of a TiN monolayer film with equivalent thickness deposited under the same conditions. Partial residual stress was released in the Ta sublayers during deposition, which led to the decrease of the residual stress of the TiN/Ta multilayer film. Nanohardness (H) of the TiN/Ta multilayer film was 24 GPa, 14% higher than that of the TiN monolayer film. It is suggested that the increase of the nanohardness is due to the introduction of the Ta layers which restrained the growth of TiN crystal and led to the decrease of the grain size. A significant increase (3.5 times) of theH3/E2(Eelastic modulus) value indicated that the TiN/Ta multilayer film has higher elasticity than the TiN monolayer film. TheLc(critical load in nano-scratch test) value of the TiN monolayer film was 45 mN, which was far lower than that of the TiN/Ta multilayer film (around 75 mN). Results of the indentation test showed a higher fracture toughness of the TiN/Ta multilayer film than that of the TiN monolayer film. Results of differential scanning calorimetric (DSC) and thermo gravimetric analysis (TGA) indicate that the TiN/Ta multilayer film has better thermal stability than the TiN monolayer film.

ACS Style

Hongfei Shang; Jian Li; Tianmin Shao. Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition. Advances in Materials Science and Engineering 2014, 2014, 1 -8.

AMA Style

Hongfei Shang, Jian Li, Tianmin Shao. Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition. Advances in Materials Science and Engineering. 2014; 2014 ():1-8.

Chicago/Turabian Style

Hongfei Shang; Jian Li; Tianmin Shao. 2014. "Mechanical Properties and Thermal Stability of TiN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition." Advances in Materials Science and Engineering 2014, no. : 1-8.