Spatially resolved photoluminescence at the sub-micro scale was used to study the optical non-uniformity of the micro-LED under varied power density excitation levels. The trend of the efficiency along injection levels were found to be highly dependent on the location of the chip mesa. The sidewall was 80% lower than the center under low-power density excitation, but was 50% higher under high-power density excitation. The external quantum efficiency droop at the center and the sidewall was 86% and 52%, respectively. A 2 µm band area near the sidewall was characterized where the efficiency and its trends changed rapidly. Beyond such band, the full width at half maximum and peak wavelength variation across the chip varied less than 1 nm, indicating high uniformity of the material composition. The sudden change = in the band, especially under high level excitation indicates the indium composition change formed by ion residues on the sidewall affect the distribution of charge carriers. These findings contribute to the understanding of cause of efficiency disadvantage and non-uniformity problems in small-size micro-LEDs.

The differences in spatially optical properties between blue and green quantum wells (QWs) in a monolithic dual-wavelength semipolar (20-21) structure were investigated by scanning near-field optical microscopy (SNOM). The shortest wavelength for green QWs and the longest wavelength for blue QWs were both discovered in the region with the largest stress. It demonstrated that In composition, compared to stress, plays a negligible role in defining the peak wavelength for blue QWs, while for green QWs, In composition strongly affects the peak wavelength. For green QWs, significant photoluminescence enhancement was observed in the defect-free region, which was not found for blue QWs. Furthermore, the efficiency droop was aggravated in the defect-free region for green QWs but reduced for blue QWs. It indicates that carrier delocalization plays a more important role in the efficiency droop for QWs of good crystalline quality, which is experimentally pointed out for the first time.