The use of fluorochemicals in lithography and semiconductor patterning plays a critical role in the success of semiconductor technology. The addition of small quantities of fluorinated materials enables patterning capabilities that are otherwise not possible to achieve, and this leads to superior device performance. The compact size of the fluorine atom and its strong electron-withdrawing characteristics make it stand out in the periodic table and gives fluorocarbon materials unique properties, unmatched by other chemical compounds. Fluorochemicals have found use in semiconductor processing for good technical reasons.