Catalytic combustion gas sensors are critical for safety and environmental monitoring, yet face persistent challenges in sensitivity and detection limits amid expanding market demands. This study innovatively employs attapulgite as a support material functionalized with noble metal catalyst Pd to fabricate a low-cost, high-sensitivity sensor. Characterization (SEM/EDS) confirms a unique Pd/attapulgite core–shell structure with engineered Pd gradient distribution (7.5–75.8 wt% from core to surface). The sensor achieves methane catalytic combustion below 300 °C, delivering 0.7 µV/ppm sensitivity and ~36 ppm detection limit. Reaction kinetics follow the Eley–Rideal mechanism, with voltage difference ($\mathsf{\Delta }\mathrm{U}$) versus methane concentration (C) conforming to the Langmuir equation ($\mathsf{\Delta }\mathrm{U}={\displaystyle \frac{{\mathrm{U}}_{\mathrm{m}\mathrm{a}\mathrm{x}}\cdot \mathrm{K}\cdot \mathrm{C}}{1+\mathrm{K}\cdot \mathrm{C}}}$, R² > 0.99, ${\mathrm{U}}_{\mathrm{m}\mathrm{a}\mathrm{x}}$ = 41.80 mV). Cost-effective fabrication and exceptional performance underscore its potential for practical deployment in industrial, residential, and environmental safety monitoring.

Addressing the urgent demand for high-precision pressure measurement in real-time barometric monitoring, aerospace, and industrial control, this paper presents a high-accuracy MEMS resonant pressure sensor based on electrostatic excitation and piezoresistive detection. The sensor incorporates a symmetric double-ended fixed-finger comb-drive resonator structure, driven into stable vibration at its natural frequency by an alternating electrostatic force. Piezoresistors integrated at the root of the resonant beams transduce the mechanical vibration into a frequency output, enabling precise external pressure measurement. Experimental results show that the developed sensor achieves an accuracy of 0.009% FS over a pressure range of 0–350 kPa across an operating temperature span from -30 °C to 50 °C, with a room-temperature repeatability error below 0.008% FS, demonstrating excellent measurement stability. Building on this performance, a real-time atmospheric pressure monitoring experiment was conducted, yielding a mean absolute percentage error of less than 0.05%, confirming the sensor's engineering practicality. This work provides an effective technique for a high-precision, high-stability resonant pressure sensor, with clear potential for deployment in real-time barometric monitoring, aerospace, and industrial control applications.

Addressing the urgent demand for high-precision pressure measurement in real-time barometric monitoring, aerospace, and industrial control, this paper presents a high-accuracy MEMS resonant pressure sensor based on electrostatic excitation and piezoresistive detection. The sensor incorporates a symmetric double-ended fixed-finger comb-drive resonator structure, driven into stable vibration at its natural frequency by an alternating electrostatic force. Piezoresistors integrated at the root of the resonant beams transduce the mechanical vibration into a frequency output, enabling precise external pressure measurement. Experimental results show that the developed sensor achieves an accuracy of 0.009% FS over a pressure range of 0–350 kPa across an operating temperature span from −30 °C to 50 °C, with a room-temperature repeatability error below 0.008% FS, demonstrating excellent measurement stability. Building on this performance, a real-time atmospheric pressure monitoring experiment was conducted, yielding a mean absolute percentage error of less than 0.05%, highlighting the sensor’s potential for engineering practicality. This work provides an effective technique for a high-precision, high-stability resonant pressure sensor, with clear potential for deployment in real-time barometric monitoring, aerospace, and industrial control applications.