Microsphere-assisted microscopy currently benefits from a considerable interest in the microscope-research community. Indeed, this new imaging technique enables the lateral resolution of optical microscopes to reach around λ/5 through a full-field and a far-field acquisition while being label-free. Despite the photonic jet clearly not being a relevant concept to justify the super-resolution phenomenon, we show here how it can be used to predict imaging formation and performance such as the image position and the microsphere magnification. This study allows a better understanding of the experimental measurements that have been observed over the last decade and that will be observed in coming years, through numerical simulations using different optical and geometrical parameters.

In the present work, we have investigated the combination of a superresolution microsphere-assisted 2D imaging technique with low-coherence phase-shifting interference microscopy. The imaging performance of this technique is studied by numerical simulation in terms of the magnification and the lateral resolution as a function of the geometrical and optical parameters. The results of simulations are compared with the experimental measurements of reference gratings using a Linnik interference configuration. Additional measurements are also shown on nanostructures. An improvement by a factor of 4.7 in the lateral resolution is demonstrated in air, thus giving a more isotropic nanometric resolution for full-field surface profilometry in the far field.

We propose an experimental method in microsphere-assisted interference microscopy that makes it possible to reconstruct surface topographies as much with high quantitative depth accuracy as when the transversal feature sizes are smaller than the classical diffraction limit. The full-field super-resolution interference microscope consists not only of one glass microsphere in the object arm but also of a second similar microsphere in the reference arm. By compensating the sphere aberrations in the two interference arms, the spatial resolution appears to be considerably increased. The increase in the three-dimensional spatial resolution allows for the topography reconstruction of 300-nm-width grating lines and 200-nm-diameter transparent nanopillars.

Through rigorous electromagnetic simulations, the natural coupling of high-spatial-frequency evanescent waves from the near field to the far field by dielectric microspheres is studied in air. The generation of whispering gallery modes inside the microspheres is shown independently of any resonance. In addition, the conversion mechanism of these evanescent waves into propagating waves is analysed. This latter point leads to key information that allows a better physical understanding of the super-resolution phenomenon in microsphere-assisted microscopy where sub-diffraction-limit revolving power is achieved.

This paper presents a simple method based on the measurement of the 3D intensity point spread function for the quality evaluation of high numerical aperture micro-optical components. The different slices of the focal volume are imaged thanks to a microscope objective and a standard camera. Depending on the optical architecture, it allows characterizing both transmissive and reflective components, for which either the imaging part or the component itself are moved along the optical axis, respectively. This method can be used to measure focal length, Strehl ratio, resolution and overall wavefront RMS and to estimate optical aberrations. The measurement setup and its implementation are detailed and its advantages are demonstrated with micro-ball lenses and micro-mirrors. This intuitive method is adapted for optimization of micro-optical components fabrication processes, especially because heavy equipments and/or data analysis are not required.