Woo-Hee Kim

Woo-Hee Kim


Research Focus & Metrics

Academic Career Length

20Years (2007-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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9 September 2020 in Advanced Functional Materials
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Journal Article
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YKYoungjun Kim
Youngjun Kim
SLSangyoon Lee
Sangyoon Lee
JSJeong‐Gyu Song
Jeong‐Gyu Song
KKKyung Yong Ko
Kyung Yong Ko
WWWhang Je Woo
Whang Je Woo
Hyungjun KimHyungjun Kim
Hyungjun Kim

11 October 2018 in Chemistry of Materials
Verified
Journal Article
Closed access
RKRizwan Khan
Rizwan Khan
BSBonggeun Shong
Bonggeun Shong
BKByeong Guk Ko
Byeong Guk Ko
JLJae Kwang Lee
Jae Kwang Lee
HLHyunsoo Lee
Hyunsoo Lee
HLHan-Bo-Ram Lee
Han-Bo-Ram Lee

30 January 2018 in Chemistry of Materials
Verified
Journal Article
Open access
JSJoseph A. Singh
Joseph A. Singh
NTNick F. W. Thissen
Nick F. W. Thissen
Woo-Hee KimWoo-Hee Kim
Woo-Hee Kim
HJHannah Johnson
Hannah Johnson
WKWilhelmus M. M. Kessels
Wilhelmus M. M. Kessels
AMAdriaan J. M. Mackus
Adriaan J. M. Mackus
Area-selective atomic layer deposition (ALD) is envisioned to play a key role in next-generation semiconductor processing and can also provide new opportunities in the field of catalysis. In this work, we developed an approach for the area-selective deposition of metal oxides on noble metals. Using O2 gas as co-reactant, area-selective ALD has been achieved by relying on the catalytic dissociation of the oxygen molecules on the noble metal surface, while no deposition takes place on inert surfaces that do not dissociate oxygen (i.e., SiO2, Al2O3, Au). The process is demonstrated for selective deposition of iron oxide and nickel oxide on platinum and iridium substrates. Characterization by in situ spectroscopic ellipsometry, transmission electron microscopy, scanning Auger electron spectroscopy, and X-ray photoelectron spectroscopy confirms a very high degree of selectivity, with a constant ALD growth rate on the catalytic metal substrates and no deposition on inert substrates, even after 300 ALD cycles. We demonstrate the area-selective ALD approach on planar and patterned substrates and use it to prepare Pt/Fe2O3 core/shell nanoparticles. Finally, the approach is proposed to be extendable beyond the materials presented here, specifically to other metal oxide ALD processes for which the precursor requires a strong oxidizing agent for growth.

14 November 2017 in ACS Applied Materials & Interfaces
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Journal Article
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SSSeunggi Seo
Seunggi Seo
BYByung Chul Yeo
Byung Chul Yeo
SHSang Soo Han
Sang Soo Han
CYChang Mo Yoon
Chang Mo Yoon
JYJoon Young Yang
Joon Young Yang
Hyungjun KimHyungjun Kim
Hyungjun Kim

15 March 2016 in ACS Nano
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Journal Article
Closed access
Woo-Hee KimWoo-Hee Kim
Woo-Hee Kim
Fatemeh Sadat Minaye HashemiFatemeh Sadat Minaye Hashemi
Fatemeh Sadat Minaye Hashemi
AMAdriaan J. M. Mackus
Adriaan J. M. Mackus
JSJoseph Singh
Joseph Singh
YKYeongin Kim
Yeongin Kim
SBStacey F. Bent
Stacey F. Bent

12 February 2007 in Microelectronic Engineering
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Journal Article
Closed access
SPSang-Joon Park
Sang-Joon Park
Woo-Hee KimWoo-Hee Kim
Woo-Hee Kim
HLHan-Bo-Ram Lee
Han-Bo-Ram Lee
WMW.J. Maeng
W.J. Maeng
HKH. Kim
H. Kim