Fine finishing of tungsten alloy is required to improve the surface quality of molds and precision instruments. Nevertheless, it is difficult to obtain high-quality surfaces as a result of grain boundary steps attributed to differences in properties of two-phase microstructures. This paper presents a theoretical and experimental investigation on chemical mechanical polishing of W–Ni–Fe alloy. The mechanism of the boundary step generation is illustrated and a model of grain boundary step formation is proposed. The mechanism reveals the effects of mechanical and chemical actions in both surface roughness and material removal. The model was verified by the experiments and the results show that appropriately balancing the mechanical and chemical effects restrains the generation of boundary steps and leads to a fine surface quality with a high removal rate by citric acid-based slurry.

Plasma figuring is a dwell time fabrication process that uses a locally delivered chemical reaction through means of an inductively coupled plasma (ICP) torch to correct surface figure errors. This paper presents two investigations for a high temperature jet (5000 K) that is used in the context of the plasma figuring process. Firstly, an investigation focuses on the aerodynamic properties of this jet that streamed through the plasma torch De-Laval nozzle and impinged optical surfaces. Secondly, the work highlights quantitatively the effects of changing the distance between the processed surface and nozzle outlet. In both investigations, results of numerical models and experiments were correlated. The authors’ modelling approach is based on computational fluid dynamics (CFD). The model is specifically created for this harsh environment. Designated areas of interests in the model domain are the nozzle convergent-divergent and the impinged substrate regions. Strong correlations are highlighted between the gas flow velocity near the surface and material removal footprint profiles. In conclusion, the CFD model supports the optimization of an ICP torch design to fulfil the demand for the correction of ultra-precision surfaces.

Ultra-precision machine tool is the most important physical tool to machining the workpiece with the frequency domain error requirement, in the design process of which the dynamic accuracy design (DAD) is indispensable and the related research is rarely available. In light of above reasons, a DAD method of ultra-precision machine tool is proposed in this paper, which is based on the frequency domain error allocation. The basic procedure and enabling knowledge of the DAD method is introduced. The application case of DAD method in the ultra-precision flycutting machine tool for KDP crystal machining is described to show the procedure detailedly. In this case, the KDP workpiece surface has the requirements in four different spatial frequency bands, and the emphasis for this study is put on the middle-frequency band with the PSD specifications. The results of the application case basically show the feasibility of the proposed DAD method. The DAD method of ultra-precision machine tool can effectively minimize the technical risk and improve the machining reliability of the designed machine tool. This paper will play an important role in the design and manufacture of new ultra-precision machine tool.

The focus of this work is the determination of the heat flux function -thermal footprint- of a plasma jet generated by an inductively coupled plasma (ICP) torch. The parameters of the heat flux function were determined through the correlation of modelling and experimental results. One surface of substrates was exposed to an impinging jet while the temperature changes of the unexposed surface was recorded, analysed and used to derive the parameters of the heat flux function. From a modelling viewpoint, a series of finite element analyses (FEA) were carried out to predict temperatures of substrate surfaces. From an experimental viewpoint, the plasma torch was powered by a 1 kW radio frequency signal generator tuned at 39 MHz. The ICP torch equipped with a De-Laval nozzle impinged the surfaces of selected substrates at atmospheric pressure. Three sets of experiments -static, single pass and multi passes- were carried out to determine and validate the numerical description of the plasma jet. Also this work enabled to determine the maximum intensity of the heat flux distribution and the total power absorbed by substrate surfaces. Finally, the most advanced numerical model was used to assess the effect of a bi-directional raster scanning strategy that was used for the processing of large optical components