This paper studied and realized a flexible nanogenerator based on P(VDF-TrFE) nanofibers and PDMS/MWCNT thin composite membrane, which worked under triboelectric and piezoelectric hybrid mechanisms. The P(VDF-TrFE) nanofibers as a piezoelectric functional layer and a triboelectric friction layer are formed by electrospinning process. In order to improve the performance of triboelectric nanogenerator, the multiwall carbon nanotubes (MWCNT) is doped into PDMS patterned films as the other flexible friction layer to increase the initial capacitance. The flexible nanogenerator is fabricated by low cost MEMS processes. Its output performance is characterized in detail and structural optimization is performed. The device’s output peak-peak voltage, power and power density under triboelectric mechanism are 25 V, 98.56 μW and 1.98 mW/cm³ under the pressure force of 5 N, respectively. The output peak-peak voltage, power and power density under piezoelectric working principle are 2.5 V, 9.74 μW, and 0.689 mW/cm³ under the same condition, respectively. We believe that the proposed flexible, biocompatible, lightweight, low cost nanogenerator will supply effective power energy sustainably for wearable devices in practical applications.

Recently, triboelectric energy nanogenerators (TENGs) have been paid the most attention by many researchers to convert mechanical energy into electrical energy. TENGs usually have a simple structure and a high output voltage. However, their high internal resistance results in low output power. In this work, we propose a flexible triboelectric energy nanogenerator with the double-side tribological layers of polydimethlysiloxane (PDMS) and PDMS/multiwall carbon nanotube (MWCNT). MWCNTs with different concentrations have been doped into PDMS to tune the internal resistance of triboelectric nanogenerator and optimize its output power. The dimension of the fabricated prototype is ~3.6 cm³. Three-axial force sensor is used to monitor the applied vertical forces on the device under vertical contact-separation working mode. The Prototype with 10 wt% MWCNT (Prototype I) produces higher output voltage than one with 2 wt% MWCNT (Prototype II) due to its higher dielectric parameter measured by LRC impedance analyzer. The triboelectric output voltages of Prototype I and Prototype II are 30 V and 25 V under the vertical force of 3.0 N, respectively. Their maximum triboelectric output powers are ~130 μW at 6 MΩ and ~120 μW at 8.6 MΩ under vertical forces, respectively.