Zuo Feng

Mr. Zuo Feng

Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
+2

Research Focus & Metrics

Academic Career Length

7Years (2020-Present)

(Calculated once Scilit publication data is synced: current year − year of first publication + 1)

Representative Publications

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26 October 2020 in Photonics
Verified
Journal Article
Open access
PDF file
ZFZuo Feng
Zuo Feng
YHYuMing He
YuMing He
WYWei Yan
Wei Yan
FYFuhua Yang
Fuhua Yang
WHWeihua Han
Weihua Han
Zhaofeng LiZhaofeng Li
Zhaofeng Li
Micro-optical gyroscopes (MOGs) are a type of high-accuracy gyroscope, which have the advantages of miniaturization, low cost, and satisfactory operating power. The quality factor (Q) of the waveguide ring resonators (WRRs) is very important to the performance of MOGs. This paper reviews various MOGs using WRRs made from different materials, including silica, indium phosphide, calcium fluoride, and polymer WRRs. The different architectures of the MOGs are reviewed, such as double-ring resonator MOGs and multiple-ring resonator MOGs. Candidate high-Q WRRs for MOGs, including silicon nitride, lithium niobite, calcium fluoride, and magnesium fluoride WRRs, are also reviewed. The manufacturing process, Q, and integration density values are compared. Summarizing the advanced WRRs and calculating the shot-noise-limited sensitivity are helpful processes in selecting suitable materials to fabricate MOGs.