Polarization- and angle-independent, dual-band metasurface thermal emitter was developed. The metasurface emits radiation at 4.26 μm and 3.95 μm, conventionally used for CO2 sensing. The metasurface is based on a planar Au/Al2O3/Au structure, in which orthogonal rectangular Au patches are arrayed alternately, and generates nearly perfect blackbody radiation with an emittance as high as 0.97. The metasurface is integrated on a resistive heater mounted on a SiN membrane, so that the infrared waves are produced by applying a voltage. The metasurface emitter was incorporated into an actual CO2 sensing system and was demonstrated to reduce the electric power needed by about 30% compared with a conventional blackbody emitter by suppressing unnecessary radiation.
Dielectric metasurfaces operating at quasi-bound states in the continuum (qBICs) can achieve exceptionally high radiative quality (Q) factors by introducing small asymmetries into their unit cells. However, fabrication imperfections often impose major limitations on the experimentally observed Q factors. In this study, we experimentally demonstrate BIC metasurfaces with a Q factor of 101,000 under normal excitation of light in the telecom wavelength range achieved by employing low-contrast silicon pairs. Our findings show that such free-space accessible ultrahigh-Q factors can be attained by leveraging both the high radiative Q factors of higher-order qBIC modes and reduced scattering losses in shallow-etched designs. Additionally, we demonstrate stable sub-picometer-level wavelength fluctuations in water, with a limit of detection of 10-5 for environmental refractive index changes. The proposed approach can be extended to BIC metasurfaces with many other configurations and operating wavelengths for ultrahigh-Q applications in both fundamental physics and advanced devices.
All‐dielectric metasurfaces have great potential as highly sensitive refractometric sensors relying on their spectral shifts because of an extensive range of design flexibilities and their smaller absorption losses than plasmonic platforms. However, simultaneously realizing both high quality ( Q ) factors and the large interplay of light with external medium in such photonic sensors remains one of the key challenges for their better performance. This study proposes silicon block metasurfaces with nanogaps to overcome this challenge based on quasi‐bound states in the continuum (BICs). We show that the metasurface has two quasi‐BIC modes—magnetic dipole (MD) and electric quadrupole (EQ)—and their electric fields experience large enhancement at the ∼30 nm nanogap regions. Consequently, introducing nanogaps into the metasurfaces increases the environmental refractive index sensitivity by up to 2.7 times in the MD mode while keeping the high Q factors and achieves the figure‐of‐merit (FOM) of 239. In addition, we show that the appropriate selection of the amount of asymmetry is needed under the trade‐off between the FOM and spectral signal‐to‐noise ratio, which provides design guidelines for highly sensitive biosensors based on quasi‐BICs.
High-performance ultrathin polarizers have been experimentally demonstrated employing stacked complementary (SC) metasurfaces, which were produced using nanoimprint lithography. It is experimentally determined that the metasurface polarizers composed of Ag and Au have large extinction ratios exceeding 17000 and 12000, respectively, in spite of the subwavelength thickness. It is also shown that the ultrathin polarizers of the SC structures are optimized at telecommunication wavelengths.