Angle measurement based on heterodyne interferometer has been attracted much research interest and applied in various fields ranging from scientific research to practical engineering. However, a systematic research on the typical heterodyne angular interferometer has not been presented before. This paper mainly focused on the error analysis of the heterodyne angular interferometer and its dynamic measurement performance. The influence of error factors originating from optical configuration, mechanical installation and environmental fluctuations on measurement accuracy is analyzed. Furthermore, the performance of the angle interferometer in measuring dynamic angle, especially for high-frequency angular vibration, is evaluated by using a high-frequency angular vibration system and an interferometric fiber optic gyroscope. Finally, the measurement capability and uncertainty of this angle interferometer are also discussed.

Many researchers from scientific and industrial fields have devoted their efforts to the laser interferometer, aiming to improve the measurement accuracy and extend the practical applications. Here, we present a modified homodyne laser interferometer based on phase modulation for simultaneously measuring displacement and angle. The active sawtooth wave phase modulation enhances immunity of this interferometer to the environmental fluctuations and laser power drift. Based on polarized optic theory and the sinusoidal measurement retro-reflector, a modified Michelson-type interferometer configuration is designed to simultaneously measure displacement and angle. Phase difference between the reference and measurement interference signals can be obtained using the sawtooth wave phase modulation and zero crossing detection technique, where the real-time displacement and angle values can be derived directly. Experimental results demonstrate our proposed interferometer has good static and dynamic performance.

The multifunction integrated optical chip (MIOC) is one of the most critical parts of the interferometric fiber optic gyroscope (IFOG), and research on the halfwave voltage of the MIOC is meaningful for a high-precision IFOG. In this paper, the correlation between the frequency and halfwave voltage, which affects the interference light intensity of IFOG, is presented theoretically. A widespread measurement method for frequency dependence of the halfwave voltage, based on lock-in amplification and sinusoidal modulation, is proposed. Further, the measurement result and the oscillation of interference light intensity in the Sagnac interferometer are presented, which are in great agreement with the theory. This paper proposes the frequency dependence of the halfwave voltage and provides a new error research direction for the improvement of the MIOC in a high-precision IFOG.

Primary angular vibration calibration devices based on laser interferometers play a crucial role in evaluating the dynamic performance of inertial sensing devices. Here, we propose a sinusoidal phase-modulated angle interferometer (SPMAI) to realize angular vibration measurements over a frequency range of 1–1000 Hz, in which the sinusoidal measurement retro-reflector (SMR) and the phase generation carrier (PGC) demodulation algorithm are adopted to track the dynamic angle variation. A comprehensive theoretical analysis is presented to reveal the relationship between demodulation performance of the SPMAI and several factors, such as phase modulation depth, carrier phase delay and sampling frequency. Both the simulated and experimental results demonstrate that the proposed SPMAI can achieve an angular vibration measurement with amplitude of sub-arcsecond under given parameters. Using the proposed SPMAI, the frequency bandwidth of an interferometric fiber-optic gyroscope (IFOG) is successfully determined to be 848 Hz.