The dissolution‐deposition cycle behavior of Li metal electrodeposited in nonaqueous electrolyte containing a small amount of HF was investigated. In the first deposition process, Li particles with a smooth hemispherical shape were deposited on Ni in 1.0 M carbonate containing HF. The morphology of these fine Li particles is due to electrodeposition via migration of ions through a thin and compact surface film consisting of a bilayer, which was produced via surface modification by HF. After the first dissolution process, a residual film was observed on the entire surface of the Ni substrate. This residual film is derived from the surface film on the Li particles. Moreover, the residual film continuously accumulated on the electrode during the cycling. On the other hand, it was found that the coulombic efficiency of Li deposition‐dissolution during cycling was much improved by the addition of HF. Unfortunately, the formation of dendritic Li was observed after the 45th cycle, suggesting that the accumulated thick residual film on the Li surface inhibits the supply of HF to the Li surface during the deposition process. © 1999 The Electrochemical Society. All rights reserved.