This paper presents a review of state-of-the-art micro-electro-mechanical-systems (MEMS) acoustic emission (AE) sensors. MEMS AE sensors are designed to detect active defects in materials with the transduction mechanisms of piezoresistivity, capacitance or piezoelectricity. The majority of MEMS AE sensors are designed as resonators to improve the signal-to-noise ratio. The fundamental design variables of MEMS AE sensors include resonant frequency, bandwidth/quality factor and sensitivity. Micromachining methods have the flexibility to tune the sensor frequency to a particular range, which is important, as the frequency of AE signal depends on defect modes, constitutive properties and structural composition. This paper summarizes the properties of MEMS AE sensors, their design specifications and applications for detecting the simulated and real AE sources and discusses the future outlook.

We explore a conformal gradient-index phononic crystal lens integrated within a pipe to amplify guided wave modes toward improved ultrasonic inspection of pipelines. The proposed conformal lens is composed of an array of cylindrical steel stubs attached to the outer surface of a steel pipe, which are tailored according to the hyperbolic secant profile of refractive index in the circumferential direction of the pipe. Hence, the ultrasonic guided wave energy is focused in the axial direction of the pipe and amplified at the focal point of the lens. Refractive indices are calculated using dispersion curves obtained from the finite element simulations of the stubbed unit cells, and the curved lens is designed for the second longitudinal wave mode of the pipe, which is commonly used in guided wave testing. The proposed lens design is implemented on a steel pipe, which is typically used in the distribution networks utilized in cities, and simultaneous focusing of longitudinal wave modes in a broad frequency range is verified through both numerical models and experimental measurements.

In this paper, micro-electro-mechanic systems (MEMS) acoustic emission (AE) transducers are manufactured using an electroplating technique. The transducers use a capacitance change as their transduction principle, and are tuned to the range 50–200 kHz. Through the electroplating technique, a thick metal layer (20 μm nickel + 0.5 μm gold) is used to form a freely moving microstructure layer. The presence of the gold layer reduces the potential corrosion of the nickel layer. A dielectric layer is deposited between the two electrodes, thus preventing the stiction phenomenon. The transducers have a measured quality factor in the range 15–30 at atmospheric pressure and are functional without vacuum packaging. The transducers are characterized using electrical and mechanical tests to identify the capacitance, resonance frequency and damping. Ultrasonic wave generation using a Q-switched laser shows the directivity of the transducer sensitivity. The comparison of the MEMS transducers with similar frequency piezoelectric transducers shows that the MEMS AE transducers have better response characteristics and sensitivity at the resonance frequency and well-defined waveform signatures (rise time and decay time) due to pure resonance behavior in the out-of-plane direction. The transducers are sensitive to a unique wave direction, which can be utilized to increase the accuracy of source localization by selecting the correct wave velocity at the structures.

We demonstrate the enhancement of immersion nonlinear ultrasonic testing (NLUT) by exploiting superlattices (SLs). NLUT can detect sub-wavelength micro-structural changes in solids by measuring the fundamental and second harmonic frequencies. The amplitude of second harmonic frequency increases with the presence of defects or other heterogeneities. The immersion NLUT is beneficial as water provides a consistent coupling condition; however, water generates high non-linearity that can mask the weak non-linearity originated from the micro-structural features in solids. In this research, SLs are proposed to remove the non-linearity arisen from water and experimental instruments. The SLs made of a periodic arrangement of composite layers can provide a band gap to restrict the propagation of a specific range of frequencies between transmitter and receiver. The periodic arrangement of solid-fluid layers is numerically designed and experimentally adapted to the immersion NLUT. Our results imply that the periodic array of 100 μm thick glass and 100 μm thick water layers provides a band gap that blocks 4.5 MHz (the second harmonic frequency), while this periodic structure passes 2.25 MHz (the first harmonic frequency). The improvement in the sensitivity of the NLUT is demonstrated through detecting the micro-structural changes associated with plastic deformation in aluminum 1100 specimens. It is revealed that the proposed methodology enhances the damage detection sensitivity of immersion NLUT by an order of magnitude as compared to the current practice.