The piezoelectric sensor-actuator plays an important role in micro high-precision dynamic systems such as medical robots and micro grippers. These mechanisms need high-precision position control, while the size of the sensor and actuator should be as small as possible. For this paper, we designed and manufactured a structure-integrated piezoelectric sensor-actuator and proposed its PID (Proportion Integral Differential) control system based on the dynamic hysteresis nonlinear model and the inverse model. Through simplifying the structure of the piezoelectric sensor-actuator by the centralized parameter method, this paper establishes its dynamic model and explores the input–output transfer function by taking the relationship between the output force and displacement as the medium. The experiment shows the maximum distance of the hysteresis curve is 0.26 μm. By parsing the hysteresis curve, this paper presents a dynamic hysteresis nonlinear model and its inverse model based on a 0.5 Hz quasi-static model and linear transfer function. Simulation results show that the accuracy of the static model is higher than that of the dynamic model when the frequency is 0.5 Hz, but the compensation accuracy of the dynamic model is obviously better than that of the static model with the increase of the frequency. This paper also proposes a control system for the sensor-actuator by means of the inverse model. The simulation results indicate that the output root mean square error was reduced to one-quarter of the original, which proves that the structure-integrated piezoelectric sensor-actuator and its control system have a great significance for signal sensing and output control of micro high-precision dynamic systems.

Using piezoelectric actuators to drive cantilever beam structures under low frequency is promising for solving high-precision control of high-end equipment. This paper presents an innovative piezoelectric actuator based on a d33 mode piezoelectric stack. It consists of the piezoelectric stack as the output force element and the sleeve as the protecting element to cater to the characteristic of piezoceramics: considerable ultimate stress, but significantly cannot withstand shearing force. The connectors effectively utilize higher piezoelectric coefficients ( d33 mode piezoceramics) to provide a bending moment that causes the cantilever beam to vibrate. The maximum amplitude is 11.35 mm while the driving voltage is 150 V and the waveform is consistent with the excitation signal. The piezoelectric actuator proposed in this paper is capable of achieving high-precision, low-frequency driving cantilever beam structures for high-end equipment.

To suppress the vibration of rotary parts, this paper established an unbalanced vibration response control model of rotary parts based on rotating axis coordinate system. This model considered the stacking transformation of geometric parameter errors and mass parameter errors of single stage rotor. First of all, the centroid transfer model based on the actual rotation axis was established, and the unbalanced excitation force vector of each stage of the rotor was studied. Secondly, the unbalanced excitation force vector of each stage of the rotor is substituted into the model of assembly vibration control based on the double constraints optimization strategy. Finally, the simulation analysis and the vibration experiment of three-stage rotor stacking assembly is carried out. The results show that the vibration of the engine rotor can be effectively suppressed by adjusting the assembly phase of the rotors, and the vibration amplitude of the combined rotor assembled by the double constraint optimization assembly strategy is 22.5% less than the vibration amplitude assembled by the direct assembly strategy. Besides, the coaxiality and the unbalance are reduced by 44.1% and 78.4%, which fully shows the advantages of the double constraint optimization assembly strategy.

The development of “large display, high performance and low cost” in the FPD industry demands glass substrates to be “larger and thinner”. Therefore, the requirements of handling robots are developing in the direction of large scale, high speed, and high precision. This paper presents a novel construction of a glass substrate handling robot, which has a 2.5 m/s travelling speed. It innovatively adopts bionic end-suction technology to grasp the glass substrate more firmly. The structure design is divided into the following three parts: a travel track, a robot body, and an end-effector. The manipulator can be smoothly and rapidly extended by adjusting the transmission ratio of the reducer to 1:2:1, using only one motor to drive two sections of the arm. This robot can transfer two pieces of glass substrate at one time, and improves the working efficiency. The kinematic and dynamic models of the robot are built based on the DH coordinate. Through the positioning accuracy experiment and vibration experiment of the end-effector, it is found that the robot has high precision during handling. The robots developed in this study can be used in large-scale glass substrate handling.