A combination of a molecular beam epitaxy (MBE) machine and a six circle diffractometer has been constructed at a dedicated wiggler beamline at the storage ring BESSY II for in situ investigations of III–V compound crystal growth. The growth conditions in our system reach a high MBE standard with a noncooled base pressure of A fast entry load lock is available for sample exchange. Large-area Be windows in the ultrahigh vacuum chamber allow us to measure reflections at entrance and exit angles up to i.e., large perpendicular momentum transfers are possible. In situ reflection high energy electron diffraction and x-ray fluorescence measurements can be performed simultaneously with x-ray scattering. A GaAs(001) surface prepared and examined in our system reveals terrace widths of 450 nm and reconstruction domain sizes of 210 nm. The possibility of time-resolved x-ray diffraction studies is demonstrated by observation of intensity oscillations during layer-by-layer homoepitaxial growth on the surface. The resolution functions of our experiment are determined.
9 October 2013 in The Journal of Physical Chemistry Letters