Colour centres in silicon carbide emerge as a promising semiconductor quantum technology platform with excellent spin-optical coherences. However, recent efforts towards maximising the photonic efficiency via integration into nanophotonic structures proved to be challenging due to reduced spectral stabilities. Here, we provide a large-scale systematic investigation on silicon vacancy centres in thin silicon carbide membranes with thicknesses down to 0.25 μm. Our membrane fabrication process involves a combination of chemical mechanical polishing, reactive ion etching, and subsequent annealing. This leads to highly reproducible membranes with roughness values of 3–4 Å, as well as negligible surface fluorescence. We find that silicon vacancy centres show close-to lifetime limited optical linewidths with almost no signs of spectral wandering down to membrane thicknesses of ~0.7 μm. For silicon vacancy centres in thinner membranes down to 0.25 μm, we observe spectral wandering, however, optical linewidths remain below 200 MHz, which is compatible with spin-selective excitation schemes. Our work clearly shows that silicon vacancy centres can be integrated into sub-micron silicon carbide membranes, which opens the avenue towards obtaining the necessary improvements in photon extraction efficiency based on nanophotonic structuring.

The development of quantum technologies is one of the big challenges in modern research. A crucial component for many applications is an efficient, coherent spin–photon interface, and coupling single-color centers in thin diamond membranes to a microcavity is a promising approach. To structure such micrometer thin single-crystal diamond (SCD) membranes with a good quality, it is important to minimize defects originating from polishing or etching procedures. Here, we report on the fabrication of SCD membranes, with various diameters, exhibiting a low surface roughness down to 0.4 nm on a small area scale, by etching through a diamond bulk mask with angled holes. A significant reduction in pits induced by micromasking and polishing damages was accomplished by the application of alternating Ar/Cl₂ + O₂ dry etching steps. By a variation of etching parameters regarding the Ar/Cl₂ step, an enhanced planarization of the surface was obtained, in particular, for surfaces with a higher initial surface roughness of several nanometers. Furthermore, we present the successful bonding of an SCD membrane via van der Waals forces on a cavity mirror and perform finesse measurements which yielded values between 500 and 5000, depending on the position and hence on the membrane thickness. Our results are promising for, e.g., an efficient spin–photon interface.

Spin-active optical emitters in silicon carbide are excellent candidates toward the development of scalable quantum technologies. However, efficient photon collection is challenged by undirected emission patterns from optical dipoles, as well as low total internal reflection angles due to the high refractive index of silicon carbide. Based on recent advances with emitters in silicon carbide waveguides, we now demonstrate a comprehensive study of nanophotonic waveguide-to-fiber interfaces in silicon carbide. We find that across a large range of fabrication parameters, our experimental collection efficiencies remain above 90%. Further, by integrating silicon vacancy color centers into these waveguides, we demonstrate an overall photon count rate of 181 kilo-counts per second, which is an order of magnitude higher compared to standard setups. We also quantify the shift of the ground state spin states due to strain fields, which can be introduced by waveguide fabrication techniques. Finally, we show coherent electron spin manipulation with waveguide-integrated emitters with state-of-the-art coherence times of T ₂ ∼ 42 μs. The robustness of our methods is very promising for quantum networks based on multiple orchestrated emitters.

Efficient optical interfacing of spin-bearing quantum emitters is a crucial ingredient for quantum networks. A promising route therefore is to incorporate host materials as minimally processed membranes into open-access microcavities: it enables significant emission enhancement and efficient photon collection, minimizes deteriorating influence on the quantum emitter, and allows for full spatial and spectral tunability. Here, we study the properties of a high-finesse fiber Fabry-Pérot microcavity with integrated single-crystal diamond membranes by scanning cavity microscopy. We observe the spatially resolved effects of the diamond-air interface on the cavity-mode structure: a strong correlation of the cavity finesse and mode structure with the diamond thickness and surface topography, prevalent transverse-mode mixing under diamondlike conditions, and mode-character-dependent polarization-mode splitting. Our results reveal the influence of the diamond surface on the achievable Purcell enhancement, which helps to clarify the route towards optimized spin-photon interfaces.

Silicon vacancy centers in 4H-silicon carbide (SiC) host a long-lived electronic spin with spin-resolved optical transitions. This makes them a great candidate for implementing a spin–photon interface, an important building block of quantum networks. However, the fraction of coherently scattered photons is intrinsically low, limiting the achievable communication rates. To address this problem, we integrate V2 centers within a SiC membrane into a fiber-based Fabry–Perot microcavity. We find that SiC is uniquely suited for this approach, offering extremely low losses as we evidence by a high cavity finesse F≈40000 and naturally available maximal cavity–emitter coupling due to the perfect alignment of polarization modes and the dipole orientation. We observe a 13.3-fold Purcell enhancement of the zero phonon line of a single emitter, constituting an efficient source of coherent photons for this novel material platform, and opening the path toward a deterministic spin–photon interface.

Solid state quantum emitters are a prime candidate in distributed quantum technologies since they inherently provide a spin-photon interface. An ongoing challenge in the field, however, is the low photon extraction due to the high refractive index of typical host materials. This challenge can be overcome using photonic structures. Here, we report the integration of V2 centers in a cavity-based optical antenna. The structure consists of a silver-coated, 135 nm-thin 4H-SiC membrane functioning as a planar cavity with a broadband resonance yielding a theoretical photon collection enhancement factor of ∼34. The planar geometry allows us to identify over 20 single V2 centers at room temperature with a mean (maximum) count rate enhancement factor of 9 (15). Moreover, we observe 10 V2 centers with a mean absorption line width below 80 MHz at cryogenic temperatures. These results demonstrate a photon collection enhancement that is robust to the lateral emitter position.