This brief presents a wafer alignment algorithm with reduced sensor number that obtains the relative distance of the wafer center and the robot hand. By ‘reduced number’, in spite of smaller number of sensors than the conventional method, we mean an improved method which achieves the similar results to pre-existing algorithms. Indeed, it can be designed with only three sensor data, less than four sensors of the conventional algorithm. Thus, some advantages of the proposed alignment algorithm include that it can be designed with low cost and less computing power. The proposed alignment algorithm is applied to a transfer robot for coater/developer system in semiconductor processing for verifying the performance of the method. The performance of the proposed method is validated by both simulation and experimental results.

In order to prove the speed regulation for permanent magnet motor systems, a control method is proposed to reject the disturbance by cogging torque, which arises from the interaction of the rotor magnets with the steel teeth on the stator. Toward this aim, we present a state observer with an internal model which has harmonics of sinusoids, and it follows from the proposed observer that the information of the cogging disturbance is obtained. It shows that the disturbance is efficiently compensated by a suitable additional control input based on the estimated information. Simulation and experimental results with an actual permanent magnet motor verify the effectiveness of the proposed observer-based algorithm.

In this paper, we consider the state estimation problem for flexible joint manipulators that involve nonlinear characteristics in their stiffness. The two key ideas of our design are that (a) an accelerometer is used in order that the estimation error dynamics do not depend on nonlinearities at the link part of the manipulators and (b) the model of the nonlinear stiffness is indeed a Lipschitz function. Based on the measured acceleration, we propose a nonlinear observer under the Lipschitz condition of the nonlinear stiffness. In addition, in order to effectively compensate for the estimation error, the gain of the proposed observer is chosen from the ARE (algebraic Riccati equations) which depend on the Lipschitz constant. Comparative experimental results verify the effectiveness of the proposed method.

This paper presents a state observer for an elastic joint with nonlinear friction via the information from an acceleration sensor. In order to avoid discontinuities, the nonlinear friction of the motor, which includes static, coulomb, and viscous terms, is considered a smooth function. In addition, it uses an acceleration sensor to obtain the information about the link with high uncertainty. The proposed state observer guarantees that the estimation error for the position and velocity of the link connected via an elastic joint containing a nonlinear stiffness (elasticity) converges to zero. In addition, it is shown that the observer gain can be designed by LMI (linear matrix inequality) optimization. Finally, to verify the performance of the proposed observer, the method proposed in this paper is tested by experiments on a two-inertia system with an elastic shaft.