Thermal conductivity of nickel and gold films on quartz (thickness 0.4–8 μm) was measured by a modulated thermoreflectance technique recording the surface temperature profile. Model calculations predict an optimum frequency for measuring thermal transport within the film. Measurements on films with various thicknesses reveal a thermal conductivity close to the bulk value for nickel while gold films exhibit a reduced conductivity with decreasing film thickness.

A photothermal microscope that provides micrometer lateral and submicrometer depth resolution was designed. Thermal conductivity measurements with modulation frequencies up to 12 MHz on single grains in polycrystalline diamond demonstrate its lateral resolution power even for a highly conducting material. Measured conductivities strongly depend on the averaged volume and values up to 2200 W/mK are found in the high frequency limit where the properties inside a grain are sampled. The capability of the instrument to measure thermal parameters on thin films is demonstrated for gold films evaporated on quartz with a thickness ranging from 20 to 1500 nm. Measurements reveal a strong thickness dependence for both thin film conductivity and the contact resistance between film and substrate. Thermal conductivity decreases monotonically from 230 to 30 W/mK whereas the contact resistance rises from 2×10⁻⁷ to 8×10⁻⁶ m²K/W with decreasing film thickness.