Jinhong Kim received the Ph.D. degree in Electrical Engineering from the University of Illinois at Urbana-Champaign, in 2021. He made several contributions to the area of microplasma and plasma-enhanced atomic layer deposition (PEALD), including the development of ALD with arrays of microplasma devices. He is also working on VUV (172nm) excimer lamp applications such as photo-assisted deposition and photolithography. Currently, he is a Postdoctoral Researcher in the Department of Electrical and Computer Engineering and Laboratory for Optical Physics and Engineering from the University of Illinois at Urbana-Champaign.