Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

In this study, we fabricated three kinds of terahertz detectors with different leakage currents to analyze the plateau-like effect. The results indicate that the platform becomes increasingly apparent with the decrease in the leakage current. The fabricated device with the lowest leakage current shows a responsivity of 4.9 kV/W and noise equivalent power (NEP) of 72 $\mathrm{pW}/\sqrt{\mathrm{Hz}}$. Further, it can be used for broadband detection between 215 GHz and 232 GHz with a voltage responsivity of more than 3.4 kV/W, and the response time can be up to 8 ns. Overall, the proposed device exhibits high sensitivity, large modulation frequency, and fast response, which indicates its excellent potential for detection and imaging applications in the THz range, including the detection of the 220 GHz atmospheric window.

We report a novel broadband slot-spiral antenna that can be integrated with high-electron-mobility transistor (HEMT) terahertz (THz) detectors. The effect of various antenna parameters on the transmission efficiency of the slot-spiral structure at 150–450 GHz is investigated systematically. The performances of the slot-spiral antenna and the spiral antenna both integrated with HEMTs are compared. The results show that the slot-spiral structure has a better transmission and miniaturization capability than the spiral structure. A formula for the responsivity is derived based on the transmission line principle and antenna theory, and results show that the detector responsivity is correlated with the antenna absorptivity. Additionally, guidelines for HEMT THz detector design are proposed. The results of this study indicate the excellent application prospects of the slot-spiral antenna in THz detection and imaging.