The development of flat, compact beam‐steering devices with no bulky moving parts is opening up a new route to a variety of exciting applications, such as LIDAR scanning systems for autonomous vehicles, robotics and sensing, free‐space, and even surface wave optical signal coupling. In this paper, the design, fabrication and characterization of innovative, nonvolatile, and reconfigurable beam‐steering metadevices enabled by a combination of optical metasurfaces and chalcogenide phase‐change materials is reported. The metadevices reflect an incident optical beam in a mirror‐like fashion when the phase‐change layer is in the crystalline state, but reflect anomalously at predesigned angles when the phase‐change layer is switched into its amorphous state. Experimental angle‐resolved spectrometry measurements verify that fabricated devices perform as designed, with high efficiencies, up to 40%, when operating at 1550 nm. Laser‐induced crystallization and reamorphization experiments confirm reversible switching of the device. It is believed that reconfigurable phase‐change‐based beam‐steering and beam‐shaping metadevices, such as those reported here, can offer real applications advantages, such as high efficiency, compactness, fast switching times and, due to the nonvolatile nature of chalcogenide phase‐change materials, low power consumption.
All-dielectric metasurfaces comprising arrays of nanostructured high-refractive-index materials are re-imagining what is achievable in terms of the manipulation of light. However, the functionality of conventional dielectric-based metasurfaces is fixed by design; thus, their optical response is locked in at the fabrication stage. A far wider range of applications could be addressed if dynamic and reconfigurable control were possible. We demonstrate this here via the novel concept of hybrid metasurfaces, in which reconfigurability is achieved by embedding sub-wavelength inclusions of chalcogenide phase-change materials within the body of silicon nanoresonators. By strategic placement of an ultra-thin layer and reversible switching of its phase-state, we show individual, multilevel, and dynamic control of metasurface resonances. We showcase our concept via the design, fabrication, and characterization of metadevices capable of dynamically filtering and modulating light in the near infrared (O and C telecom bands), with modulation depths as high as 70% and multilevel tunability. Finally, we show numerically how the same approach can be re-scaled to shorter wavelengths via appropriate material selection, paving the way to additional applications, such as high-efficiency vivid structural color generators in the visible spectrum. We believe that the concept of hybrid all-dielectric/phase-change metasurfaces presented in this work could pave the way for a wide range of design possibilities in terms of multilevel, reconfigurable, and high-efficiency light manipulation.
We present novel phase-change material based metasurfaces for dynamic, recnofigurable and efficient wavefront shaping in the infrared spectrum. Dynamic control and reconfigurability was obtained by incorporating an ultra-thin layer of the widely-used phase change material Ge 2 Sb 2 Te 5 . Our approach exploits hybrid dielectic/plasmonic resonances to achieve local (subwavelength) phase control of light with low losses. A full 2π optical phase coverage was achieved with this approach, which allows for a wide flexibility in terms of realizable designs. To illustrate this concept, dynamic beam steering devices and reconfigurable planar focusing mirrors (both operating at optical telecommunications wavelengths) and their performance investigated. Absolute efficiencies up to 65% are achieved, significantly higher than the efficiencies of more commonly reported plasmonic-based phase-change metasurfaces.
10 October 2025 in Journal of Physics D: Applied Physics
Active metamaterials are engineered structures that possess novel properties that can be changed after the point of manufacture. Their novel properties arise predominantly from their physical structure, as opposed to their chemical composition and can be changed through means such as direct energy addition into wave paths, or physically changing/morphing the structure in response to both a user or environmental input. Active metamaterials are currently of wide interest to the physics community and encompass a range of sub-domains in applied physics (e.g. photonic, microwave, acoustic, mechanical, etc.). They possess the potential to provide solutions that are more suitable to specific applications, or which allow novel properties to be produced which cannot be achieved with passive metamaterials, such as time-varying or gain enhancement effects. They have the potential to help solve some of the important current and future problems faced by the advancement of modern society, such as achieving net-zero, sustainability, healthcare and equality goals. Despite their huge potential, the added complexity of their design and operation, compared to passive metamaterials creates challenges to the advancement of the field, particularly beyond theoretical and lab-based experiments. This roadmap brings together experts in all types of active metamaterials and across a wide range of areas of applied physics. The objective is to provide an overview of the current state of the art and the associated current/future challenges, with the hope that the required advances identified create a roadmap for the future advancement and application of this field.
Direct Laser Interference Patterning (DLIP) is a versatile technique that enables the fabrication of periodic micro‐ to nanometric scale structures over large areas in a variety of materials. The periodically modulated excitation pattern can be exploited to trigger a range of complex processes, including heating, melting, ablation, and matter reorganization.In this work, a novel strategy is developed to combine deep‐ultraviolet (UV) DLIP (λ = 193 nm, τ = 23 ns) and real‐time optical reflectivity and diffraction techniques to unravel the formation dynamics of grating structures with periods down to Λ = 740 nm. Applied to crystalline Ge wafers, single‐pulse topography modulation profiles with amplitudes up to 85 nm can be imprinted. Moreover, the dynamics of the melting and solidification processes, as well as the surface topography deformation, can be followed in real‐time. Combined with a model, changes in topography over time with ns resolution can be obtained. The results unambiguously reveal that the formation process of the 3D structures can only be understood when taking both Marangoni convection and thermocapillary waves into account. The technique presented here has the potential to unravel the formation dynamics of a wide range of periodic structures in other materials.
Materials of which the refractive indices can be thermally tuned or switched, such as in chalcogenide phase-change alloys, offer a promising path towards the development of active optical metasurfaces for the control of the amplitude, phase, and polarization of light. However, for phase-change metasurfaces to be able to provide viable technology for active light control, in situ electrical switching via resistive heaters integral to or embedded in the metasurface itself is highly desirable. In this context, good electrical conductors (metals) with high melting points (i.e., significantly above the melting point of commonly used phase-change alloys) are required. In addition, such metals should ideally have low plasmonic losses, so as to not degrade metasurface optical performance. This essentially limits the choice to a few noble metals, namely, gold and silver, but these tend to diffuse quite readily into phase-change materials (particularly the archetypal Ge2Sb2Te5 alloy used here), and into dielectric resonators such as Si or Ge. In this work, we introduce a novel hybrid dielectric/plasmonic metasurface architecture, where we incorporated a thin Ge2Sb2Te5 layer into the body of a cubic silicon nanoresonator lying on metallic planes that simultaneously acted as high-efficiency reflectors and resistive heaters. Through systematic studies based on changing the configuration of the bottom metal plane between high-melting-point diffusive and low-melting-point nondiffusive metals (Au and Al, respectively), we explicitly show how thermally activated diffusion can catastrophically and irreversibly degrade the optical performance of chalcogenide phase-change metasurface devices, and how such degradation can be successfully overcome at the design stage via the incorporation of ultrathin Si3N4 barrier layers between the gold plane and the hybrid Si/Ge2Sb2Te5 resonators. Our work clarifies the importance of diffusion of noble metals in thermally tunable metasurfaces and how to overcome it, thus helping phase-change-based metasurface technology move a step closer towards the realization of real-world applications.