received the B.E. degree in microelectronics science and engineering from Central South University, Changsha, China, in 2019. He is M.S degree in reading in microelectronics and solid-state electronic from Peking University Shenzhen Graduate School, Shenzhen, China. He is currently with the TSV 3D Integrated Micro/Nanosystem Laboratory, Peking University Shenzhen Graduate School, Shenzhen, China. He is currently engaged in AlN PMUT applications including ranging and accurate extraction of AlN material constants.