Silicon nanowires are attractive materials from the point of view of their electrical properties or high surface-to-volume ratio, which makes them interesting for sensing applications. However, they can achieve a better performance by adjusting their surface properties with organic/inorganic compounds. This review gives an overview of the main techniques used to modify silicon nanowire surfaces as well as characterization techniques. A comparison was performed with the functionalization method developed, and some applications of modified silicon nanowires and their advantages on those non-modified are subsequently presented. In the final words, the future opportunities of functionalized silicon nanowires for chipless tag radio frequency identification (RFID) have been depicted.

This paper shows the possibility to detect the presence of grafted molecules on the surface of silicon nanowires with a wireless RF radar approach based on the measurement of the backscattered signal of a resonant structure on which the nanowires are deposited. The measured resonance frequency allows the determination of the intrinsic properties related to temperature and humidity variations, which can be related to the presence of the grafted molecules. Several functionalizations of nanowires have been realized and characterized. For the first time, an RF approach is used to detect significant differences related to the presence of grafted molecules on the surface of nanowires. In addition to detecting their presence, the obtained results show the potential of the radar approach to identify the type of functionalization of nanowires. A set of six different grafted molecules (including octadecyltrichlorosilane, ethynylpyrene, N3) was tested and correctly separated with the proposed approach. Various measurements of the same samples showed a good repeatability which made the approach compatible with the possibility of differentiating the molecules with each other by radar reading. Moreover, discussions about the application of such functionalizations are made to increase the sensibility of sensors using a radar approach.