The heterojunction between metal and silicon (Si) is an attractive route to extend the response of Si-based photodiodes into the near-infrared (NIR) region, so-called Schottky barrier diodes. Photons absorbed into a metallic nanostructure excite the surface plasmon resonances (SPRs), which can be damped non-radiatively through the creation of hot electrons. Unfortunately, the quantum efficiency of hot electron detectors remains low due to low optical absorption and poor electron injection efficiency. In this study, we propose an efficient and low-cost plasmonic hot electron NIR photodetector based on a Au nanoparticle (Au NP)-decorated Si pyramid Schottky junction. The large-area and lithography-free photodetector is realized by using an anisotropic chemical wet etching and rapid thermal annealing (RTA) of a thin Au film. We experimentally demonstrate that these hot electron detectors have broad photoresponsivity spectra in the NIR region of 1200–1475 nm, with a low dark current on the order of 10 −5 A cm −2 . The observed responsivities enable these devices to be competitive with other reported Si-based NIR hot electron photodetectors using perfectly periodic nanostructures. The improved performance is attributed to the pyramid surface which can enhance light trapping and the localized electric field, and the nano-sized Au NPs which are beneficial for the tunneling of hot electrons. The simple and large-area preparation processes make them suitable for large-scale thermophotovoltaic cell and low-cost NIR detection applications.
Gas identification and concentration measurements are important for both understanding and monitoring a variety of phenomena from industrial processes to environmental change. Here a novel mid-IR plasmonic gas sensor with on-chip direct readout is proposed based on unity integration of narrowband spectral response, localized field en-hancement and thermal detection. A systematic investigation consisting of both optical and thermal simulations for gas sensing is presented for the first time in three sensing modes including refractive index sensing, absorption sensing and spectroscopy, respectively. It is found that a detection limit less than 100 ppm for CO2 could be realized by a combination of surface plasmon resonance enhancement and metal-organic framework gas enrichment with an enhancement factor over 8000 in an ultracompact optical interaction length of only several microns. Moreover, on-chip spectroscopy is demonstrated with the compressive sensing algorithm via a narrowband plasmonic sensor array. An array of 80 such sensors with an average resonance linewidth of 10 nm reconstructs the CO2 molecular absorption spectrum with the estimated resolution of approximately 0.01 nm far beyond the state-of-the-art spectrometer. The novel device design and analytical method are expected to provide a promising technique for extensive applications of distributed or portable mid-IR gas sensor.