In high speed and high precision machining applications, it is important to monitor the machining process in order to ensure high product quality. For this purpose, it is essential to develop a dynamometer with high sensitivity and high natural frequency which is suited to these conditions. This paper describes the design, calibration and performance of a milling torque sensor based on piezoresistive MEMS strain. A detailed design study is carried out to optimize the two mutually-contradictory indicators sensitivity and natural frequency. The developed torque sensor principally consists of a thin-walled cylinder, and a piezoresistive MEMS strain gauge bonded on the surface of the sensing element where the shear strain is maximum. The strain gauge includes eight piezoresistances and four are connected in a full Wheatstone circuit bridge, which is used to measure the applied torque force during machining procedures. Experimental static calibration results show that the sensitivity of torque sensor has been improved to 0.13 mv/Nm. A modal impact test indicates that the natural frequency of torque sensor reaches 1216 Hz, which is suitable for high speed machining processes. The dynamic test results indicate that the developed torque sensor is stable and practical for monitoring the milling process.

A strain-type three-component table dynamometer is presented in this paper, which reduces output errors produced by cutting forces imposed on the different milling positions of a workpiece. A sensor structure with eight parallel elastic beams is proposed, and sensitive regions and Wheastone measuring circuits are also designed in consideration of eliminating the influences of the eccentric forces. To evaluate the sensor decoupling performance, both of the static calibration and dynamic milling test were implemented in different positions of the workpiece. Static experiment results indicate that the maximal deviation between the measured forces and the standard inputs is 4.58%. Milling tests demonstrate that with same machining parameters, the differences of the measured forces between different milling positions derived by the developed sensor are no larger than 6.29%. In addition, the natural frequencies of the dynamometer are kept higher than 2585.5 Hz. All the measuring results show that as a strain-type dynamometer, the developed force sensor has an improved eccentric decoupling accuracy with natural frequencies not much decreased, which owns application potential in milling process monitoring.