A micro scanning mirror is an optical device used to scan laser beams which can be used for Light Detection and Ranging (LiDAR) in applications like unmanned driving or Unmanned Aerial Vehicle (UAV). The MEMS scanning mirror’s light-weight and low-power make it a useful device in LiDAR applications. However, the MEMS scanning mirror’s small aperture limits its application because it is too small to deflect faint receiving light. In this paper, we present a Ti-alloy-based electromagnetic micro scanning mirror with very large-aperture (12 mm) and rapid scanning frequency (1.24 kHz). The size of micro-scanner’s mirror plate reached 12 mm, which is much larger than familiar MEMS scanning mirror. The scanner is designed using MEMS design method and fabricated by electro-sparking manufacture method. As the experimental results show, the resonant frequency of the micro scanning mirror is 1240 Hz and the optical scanning angle can reach 26 degrees at resonance frequency when the actuation current is 250 mApp.

The MEMS (Micro-Electronical Mechanical System) scanning mirror is an optical MEMS device that can scan laser beams across one or two dimensions. MEMS scanning mirrors can be applied in a variety of applications, such as laser display, bio-medical imaging and Light Detection and Ranging (LiDAR). These commercial applications have recently created a great demand for low-driving-voltage and low-power MEMS mirrors. However, no reported two-axis MEMS scanning mirror is available for usage in a universal supplying voltage such as 5 V. In this paper, we present an ultra-low voltage driven two-axis MEMS scanning mirror which is 5 V compatible. In order to realize low voltage and low power, a two-axis MEMS scanning mirror with mechanical leverage driven by PZT (Lead zirconate titanate) ceramic is designed, modeled, fabricated and characterized. To further decrease the power of the MEMS scanning mirror, a new method of impedance matching for PZT ceramic driven by a two-frequency mixed signal is established. As experimental results show, this MEMS scanning mirror reaches a two-axis scanning angle of 41.9° × 40.3° at a total driving voltage of 4.2 Vpp and total power of 16 mW. The effective diameter of reflection of the mirror is 2 mm and the operating frequencies of two-axis scanning are 947.51 Hz and 1464.66 Hz, respectively.

Biomechanical energy harvesting is a feasible solution for powering wearable sensors by directly driving electronics or acting as wearable self-powered sensors. A wearable insole that not only can harvest energy from foot pressure during walking but also can serve as a self-powered human motion recognition sensor is reported. The insole is designed as a sandwich structure consisting of two wavy silica gel film separated by a flexible piezoelectric foil stave, which has higher performance compared with conventional piezoelectric harvesters with cantilever structure. The energy harvesting insole is capable of driving some common electronics by scavenging energy from human walking. Moreover, it can be used to recognize human motion as the waveforms it generates change when people are in different locomotion modes. It is demonstrated that different types of human motion such as walking and running are clearly classified by the insole without any external power source. This work not only expands the applications of piezoelectric energy harvesters for wearable power supplies and self-powered sensors, but also provides possible approaches for wearable self-powered human motion monitoring that is of great importance in many fields such as rehabilitation and sports science.

In this paper, we propose a two-dimensional resonant MEMS scanning mirror with an integrated ultra-compact multiplied angle amplification for miniature LIDAR application. A wedge-like structure is designed to magnify scanning angle of a 2D MEMS scanner which can also reduce driving voltage, decrease maximum stress and increase reliability and life. Compared with other angle amplification, the wedge does not consist of any complex optical lens or structures. The amplification is more compact than former that only 1mm increasing in height of package is needed for enlarging angle. A double scanning angle amplification is experimented. Appling a voltage of 12.5V peak-to-peak(7.5Vac at frequency of 710Hz and 5Vac at frequency of 997Hz) results in optical scan of 45.3° in x-axis and 42.6° in y-axis at atmosphere pressure which is rather low driving voltage for 2D resonant MEMS scanner at present.

Micromirror-based scanning displays have been the focus of a variety of applications. Lissajous scanning displays have advantages in terms of power consumption; however, the image quality is not good enough. The main reason for this is the varying size and the contrast ratio of pixels at different positions of the image. In this paper, the Lissajous scanning trajectory is analyzed and a new method based on the diamond pixel is introduced to Lissajous displays. The optical performance of micromirrors is discussed. A display system demonstrator is built, and tests of resolution and contrast ratio are conducted. The test results show that the new Lissajous scanning method can be used in displays by using diamond pixels and image quality remains stable at different positions.