In this paper, we present a vibration energy harvester using magnetoelectric laminate composite and a springless spherical permanent magnet as a proof mass. The harvester utilizes a freely movable spherical permanent magnet to transform external vibration into a time varying magnetic field applied to the magnetoelectric transducer. The laminate composite consists of a Ni–Mn–Ga-based MSMA (magnetic shape memory alloy) element and a PZT (lead zirconate titanate) plate. A proof-of-concept harvester has been fabricated and characterized at various input accelerations and frequencies. A maximum open circuit voltage of 1.18 V has been obtained in response to a 3g vibration at 17 Hz with the fabricated device. Moreover, a maximum output voltage of 10.24 V and output power of 4.1 μW have been achieved on a 950 Ω load, when the fabricated energy harvester was mounted on a smartphone and shaken by hand.

We present the design, fabrication, and measurement results of an electromagnetic biaxial microscanner with mechanical amplification mechanism. A gimbaled scanner with two distinct single-crystal silicon layer thicknesses and integrated copper coils has been fabricated with combination of surface and bulk micromachining processes. A magnet assembly consisting of an array of permanent magnets and a pole piece has been placed under the substrate to provide high strength lateral magnetic field oriented 45° to two perpendicular scanning axes. Micromirror has been supported by additional gimbal to implement a mechanical amplification. A 1.2mm-diameter mirror with aluminum reflective surface has been actuated at 60Hz for vertical scan and at 21kHz for horizontal scan. Maximum scan angle of 36.12° at 21.19kHz and 17.62° at 60Hz have been obtained for horizontal and vertical scans, respectively.

We present an electromagnetic linear vibration energy harvester with an array of rectangular permanent magnets as a springless proof mass. Instead of supporting the magnet assembly with spring element, ferrofluid has been used as a lubricating material. When external vibration is applied laterally to the harvester, magnet assembly slides back and forth on the channel with reduced friction and wear due to ferrofluid, which significantly improves the long-term reliability of the device. Electric power is generated across an array of copper windings formed at the bottom of the aluminum housing. A proof-of-concept harvester has been fabricated and tested with a vibration exciter at various input frequencies and accelerations. For the device where 5 μL of ferrofluid was used for lubrication, maximum output power of 493 μW has been generated, which was 4.37% higher than that without ferrofluid. Long-term reliability improvement due to ferrofluid lubrication has also been verified. For the device with ferrofluid, 1.02% decrease of output power has been observed, in contrast to 59.73% decrease of output power without ferrofluid after 93,600 cycles.

In this article, a low power and compact scanning micromirror for LiDAR (light detection and ranging) system is designed, fabricated, and characterized. A 5 mm-diameter scanning micromirror is electromagnetically actuated with multi-turn copper winding formed on the gimbal and magnet assembly formed under the silicon substrate. A unique magnetic circuit that generates an asymmetric radial magnetic field has been designed and analyzed. A series-connected double spring-mass system consisting of a gimbal and a mirror plate has been used to amplify the deflection angle. An analytic model of the system has been developed and verified with finite element analysis. Also, a reinforcement rim structure is utilized to reduce the dynamic deformation of the reflective surface down to 19.3 nm _rms . An optical scan angle of 30 ^o is obtained at 690 Hz, 17.4 mA _rms input, and corresponding power consumption is 7.8 mW _rms . A prototype scanning system with 180 ^o x 30 ^o field-of-view has been demonstrated with fabricated scanning micromirror as the vertical scanner. The proposed approach provides a simple and compact design for a large diameter scanning micromirror, which can potentially be utilized in various LiDAR applications.

We present the design, fabrication, and analysis of an electromagnetic biaxial scanning micromirror for a high definition laser pico projection display system. The device consists of a microfabricated double gimbaled structure for mechanical amplification of horizontal scan angle and a set of uniquely designed permanent magnets for high magnetic field generation in a small volume. With the fabricated 1.2 mm-diameter micromirror, the maximum scan angle of 52° at 28.9 kHz and 33° at 60 Hz have been obtained for horizontal and vertical scans, respectively. The effective volume of the packaged micromirror measures 0.34 cm3. A prototype full-color pico projection display system has been fabricated with micromirror package and laser sources integrated into a 3.7 cm3volume.

We present the design optimization, fabrication, and analysis of an electromagnetic biaxial scanning micromirror with 6.4 mm-diameter. The scanner is composed of a micromirror supported by two concentric gimbal structures with unique single turn coil. A cylindrical permanent magnet assembly is placed under the micromirror to provide a radial magnetic field for actuation. Lumped element model parameters and magnetic circuit have been optimized to maximize the driving torque. Fabricated micromirror has been actuated at 300 Hz and 1,010 Hz and maximum optical scan angle of 25.6° and 35.3° have been obtained for the vertical and horizontal scans, respectively. Crosstalk during the actuation has been analyzed, and improved models have been proposed to reduce the crosstalk.