In this paper, we present a macroscale multiresonant vibration-based energy harvester. The device features frequency tunability through magnetostatic actuation on the resonator. The magnetic tuning scheme uses external magnets on linear stages. The system-level model demonstrates autonomous adaptation of resonance frequency to the dominant ambient frequencies. The harvester is designed such that its two fundamental modes appear in the range of (50,100) Hz which is a typical frequency range for vibrations found in industrial applications. The dual-frequency characteristics of the proposed design together with the frequency agility result in an increased operative harvesting frequency range. In order to allow a time-efficient simulation of the model, a reduced order model has been derived from a finite element model. A tuning control algorithm based on maximum-voltage tracking has been implemented in the model. The device was characterized experimentally to deliver a power output of 500 µW at an excitation level of 0.5 g at the respected frequencies of 63.3 and 76.4 Hz. In a design optimization effort, an improved geometry has been derived. It yields more close resonance frequencies and optimized performance.

We present a multiresonant vibration energy harvester designed for ultra-low-power applications in industrial environments together with an optimized harvester design. The proposed device features dual-frequency operation, enabling the harvesting of energy over a wider operational frequency range. It has been designed such that its harvesting bandwidth range is [50, 100] Hz, which is a typical frequency range for vibrations found in industrial applications. At an excitation level of 0.5 g, a maximum mean power output of 6 mW and 9 mW can be expected at the resonance frequencies of 63.3 and 76.4 Hz, respectively. The harvester delivers a power density of 492 µW/cm². Design optimization led to improved harvester geometries yielding up to 2.6 times closer resonance frequencies, resulting in a wider harvesting bandwidth and a significantly higher power output.

In order to satisfy the demand for the high functionality of future microdevices, research on new concepts for multistable microactuators with enlarged working ranges becomes increasingly important. A challenge for the design of such actuators lies in overcoming the mechanical connections of the moved object, which limit its deflection angle or traveling distance. Although numerous approaches have already been proposed to solve this issue, only a few have considered multiple asymptotically stable resting positions. In order to fill this gap, we present a microactuator that allows large vertical displacements of a freely moving permanent magnet on a millimeter-scale. Multiple stable equilibria are generated at predefined positions by superimposing permanent magnetic fields, thus removing the need for constant energy input. In order to achieve fast object movements with low solenoid currents, we apply a combination of piezoelectric and electromagnetic actuation, which work as cooperative manipulators. Optimal trajectory planning and flatness-based control ensure time- and energy-efficient motion while being able to compensate for disturbances. We demonstrate the advantage of the proposed actuator in terms of its expandability and show the effectiveness of the controller with regard to the initial state uncertainty.

This paper presents a system-level model of a microsystem architecture deploying cooperating microactuators. An assembly of a piezoelectric kick-actuator and an electromagnetic catch-actuator manipulates a structurally unconnected, magnetized micromirror. The absence of mechanical connections allows for large deflections and multistability. Closed-loop feedback control allows this setup to achieve high accuracy, but requires fast and precise system-level models of each component. Such models can be generated directly from large-scale finite element (FE) models via mathematical methods of model order reduction (MOR). A special challenge lies in reducing a nonlinear multiphysical FE model of a piezoelectric kick-actuator and its mechanical contact to a micromirror, which is modeled as a rigid body. We propose to separate the actuator–micromirror system into two single-body systems. This step allows us to apply the contact-induced forces as inputs to each sub-system and, thus, avoid the nonlinear FE model. Rather, we have the linear model with nonlinear input, to which established linear MOR methods can be applied. Comparisons between the reference FE model and the reduced order model demonstrate the feasibility of the proposed methodology. Finally, a system-level simulation of the whole assembly, including two actuators, a micromirror and a simple control circuitry, is presented.

This paper provides an overview of techniques of compact modeling via model order reduction (MOR), emphasizing their application to cooperative microactuators. MOR creates highly efficient yet accurate surrogate models, facilitating design studies, optimization, closed-loop control and analyses of interacting components. This is particularly important for microactuators due to the variety of physical effects employed, their short time constants and the many nonlinear effects. Different approaches for linear, parametric and nonlinear dynamical systems are summarized. Three numerical case studies for selected methods complement the paper. The described case studies emerged from the Kick and Catch research project and within a framework of the German Research Foundation’s Priority Program, Cooperative Multistable Multistage Microactuator Systems (KOMMMA).