A simple and versatile method for the decoration of CVD grown graphene with metal nanoparticles is presented. The mechanism of nanoparticle formation is galvanic displacement resulting in physically adsorbed clusters. The single layer graphene obtained by this method can be easily transferred. Integration onto a gas sensing transducer is presented as proof of concept.

Advances in siliconcarbide microfabrication and growth process optimization for siliconcarbide nanostructures are ushering in new opportunities for microdevices capable of operation in a variety of demanding applications, involving high temperature, radiation, or corrosive environment. This review focuses on the materials science and processing technologies for siliconcarbidethin films and low dimensional structures, and details recent progress in manufacturing technology, including deposition, metallization, and fabrication of semiconductor microdevices, with emphasis on sensor technology. The challenges remaining in developing siliconcarbide as a mainstay materials platform are discussed throughout.

We report on the fabrication of an all solid-state micro-supercapacitor using patterned photoresist-derived porous carbon electrodes and an ionogel electrolyte. The interdigitated finger electrodes are synthesized via pyrolysis of the SPR-220 photoresist, which results in high surface area porous carbon via a highly scalable technique. The ionogel electrolyte is formed using 1-ethyl-3-methylimidazolium bis(trifluoromethylsulfonyl)imide ionic liquid hybridized with fumed silica nanopowder. The fabricated device has an excellent long-term cycling stability. The maximum energy density obtained is about 3 mW h cm⁻³, higher than that of commercial Li-ion thin film batteries, with the maximum achieved power density of 26 W cm⁻³. Our results indicate that the novel combination of the pyrolyzed photoresist with an ionogel electrolyte holds promise for applications in integrated energy storage for all solid-state microsystems technologies.

In this study, manganese oxide (MnO_x)-decorated carbonized porous silicon nanowire arrays (MnO_x/C/PSiNWs) are synthesized through eco-friendly and cost-effective processes. This electrode material system exhibits excellent electrochemical behavior with a specific capacitance reaching 635 F g⁻¹, as well as the highest areal power (100 mWcm⁻²) and energy (0.46 mW h cm⁻²) ever reported in a silicon nanowire-based pseudocapacitor electrode. Furthermore, an asymmetric hybrid supercapacitor (AHS) is designed using MnO_x/C/PSiNWs as the positive electrode, carbonized porous silicon nanowires (C/PSiNWs) as the negative electrode and 1-ethyl-3-methyl-imidazolium bis(trifluoromethylsulfonyl)imide (EMIM-TFSI)/acetonitrile as the electrolyte. The supercapacitor shows an excellent power density of 25 kW kg⁻¹ and an energy density of 261 W h kg⁻¹ at a current density of 0.2 mA cm⁻² with a large operational potential window (3.6 V) and a good capacitance retention (82% after 10 000 CV cycles). The results show that the MnO_x/C/PSiNW electrodes are promising materials for the future generation of high performance supercapacitors.