Micromachined resonant accelerometers (MRAs), especially those devices fabricated by silicon on glass technology, suffer from temperature drift error caused by inherent thermal stress. This paper proposes two structure designs to attenuate the effect of thermal stress. The first MRA structure is realized by optimizing the locations of the bonding anchors and utilizing a special-shaped substrate to isolate the thermal stress generated during the die attach process. The second structure is designed using an isolation frame fixed by a single anchor to replace all dispersed anchors associated with the suspension beams and micro-levers. Simulated and experimental results show that both of the MRA structures can effectively reduce the thermal stress effect. The experimental results on one MRA prototype indicate that the differential temperature sensitivity reduces down to 1.9 μg/°C and its 15-day bias stability reaches 1.4 μg.

Drop tower is the most common ground-based facility to provide microgravity environment and widely used in many science experiments. A differential space accelerometer has been proposed to test the spin-gravity interaction between rotating extended bodies onboard a drag-free satellite. In order to assist design and test of this inertial sensor in a series of ground- based pre-flight experiments, it is very important to know accurately the residual acceleration of drop towers. In this report, a sensitive instrument for this purpose was built with a high-performance servo quartz accelerometer and the dedicated interface electronics design providing small full-scale range and high sensitivity, up to 136.8 V/g₀. The residual acceleration at the Beijing drop tower was measured using two different drop capsules. The experimental result shows that the microgravity level of the free-falling double capsule is better than 2 × 10⁻⁴g₀ (Earth’s gravity). The measured data in this report provides critical microgravity information for design of the following ground experiments.

The gravity disturbance vector is one of the major error sources in high-precision and long-term inertial navigation applications. Specific to the inertial navigation systems (INSs) with high-order horizontal damping networks, analyses of the error propagation show that the gravity-induced errors exist almost exclusively in the horizontal channels and are mostly caused by deflections of the vertical (DOV). Low-frequency components of the DOV propagate into the latitude and longitude errors at a ratio of 1:1 and time-varying fluctuations in the DOV excite Schuler oscillation. This paper presents two gravity compensation methods using the Earth Gravitational Model 2008 (EGM2008), namely, interpolation from the off-line database and computing gravity vectors directly using the spherical harmonic model. Particular attention is given to the error contribution of the gravity update interval and computing time delay. It is recommended for the marine navigation that a gravity vector should be calculated within 1 s and updated every 100 s at most. To meet this demand, the time duration of calculating the current gravity vector using EGM2008 has been reduced to less than 1 s by optimizing the calculation procedure. A few off-line experiments were conducted using the data of a shipborne INS collected during an actual sea test. With the aid of EGM2008, most of the low-frequency components of the position errors caused by the gravity disturbance vector have been removed and the Schuler oscillation has been attenuated effectively. In the rugged terrain, the horizontal position error could be reduced at best 48.85% of its regional maximum. The experimental results match with the theoretical analysis and indicate that EGM2008 is suitable for gravity compensation of the high-precision and long-term INSs.

A micromachined electrostatically-suspended accelerometer (MESA) is a kind of three-axis inertial sensor based on fully-contactless electrostatic suspension of the proof mass (PM). It has the potential to offer broad bandwidth, high sensitivity, wide dynamic range and, thus, would be perfectly suited for land seismic acquisition. Previous experiments showed that it is hard to lift up the PM successfully during initial levitation as the mass needs to be levitated simultaneously in all six degrees of freedom (DoFs). By analyzing the coupling electrostatic forces and torques between three lateral axes, it is found there exists a self-locking zone due to the cross-axis coupling effect. To minimize the cross-axis coupling and solve the initial levitation problem, this paper proposes an effective control scheme by delaying the operation of one lateral actuator. The experimental result demonstrates that the PM can be levitated up with six-DoF suspension operation at any initial position. We also propose a feed-forward compensation approach to minimize the negative stiffness effect inherent in electrostatic suspension. The experiment results demonstrate that a more broadband linear amplitude-frequency response and higher suspension stiffness can be achieved, which is crucial to maintain high vector fidelity for potential use as a three-component MEMS geophone. The preliminary performance tests of the three-axis linear accelerometer were conducted under normal atmospheric pressure and room temperature. The main results and noise analysis are presented. It is shown that vacuum packaging of the MEMS sensor is essential to extend the bandwidth and lower the noise floor, especially for low-noise seismic data acquisition.

A large piston-displacement electrothermal micromirror with closed-loop control of both piston scan and tilting of the mirror plate is demonstrated for use in a miniature Fourier transform spectrometer. Constant scan velocity in an ultra large piston scan range has been demonstrated by the proposed closed-loop piston control scheme which can be easily implemented without considerably increasing system complexity. The experimental results show that the usable linear scan range generated by the micromirror has been extended up to 505 μm. The measured spectral resolution in a compact spectrometer reaches 20 cm⁻¹, or 0.57 nm at 532 nm wavelength. Compared to other presented systems, this microspectrometer will benefit from the closed-loop thermal actuator approach utilizing both the piston servo and tilt control to provide more consistent spectral response, improved spectral resolution and enhanced robustness to disturbances.

As a specific force sensor, the tri-axis accelerometer is one of the core instruments in an inertial navigation system (INS). During navigation, its measurement error directly induces constant or alternating navigation errors of the same order of magnitude. Moreover, it also affects the estimation accuracy of gyro drift coefficients during the initial alignment and calibration, which will indirectly result in navigation errors accumulating over time. Calibration can effectively improve measurement accuracy of the accelerometer. Device-level calibration can identify all of the parameters in the error model, and the system-level calibration can accurately estimate part of these parameters. Combining the advantages of both the methods and making full use of the precise angulation of the space-stabilized platform, this paper proposes a three-stage accelerometer self-calibration technique that can be implemented directly in the space-stable INS. The device-level calibration is divided into two steps considering the large amount of parameters. The first step is coarse calibration, which identifies parameters except for the nonlinear terms, and the second step is fine calibration, which not only identifies the nonlinear parameters, but also improves the accuracy of the parameters identified in the first step. The follow-on system-level calibration is carried out on part of the parameters using specific force error and attitude error to further improve the calibration accuracy. Simulation result shows that by using the proposed three-stage calibration technique in the space-stable INS, the estimation accuracy of accelerometer error can reach ${1\times 10}^{-6}\mathrm{g}$ order of magnitude. Experiment results show that after the three-stage calibration, the accuracy of latitude, longitude, and attitude angles has increased by over 45% and the accuracy of velocity has increased by over 22% during navigation.