Microtransfer printing is a sophisticated technique for the heterogeneous integration of separately fabricated micro/nano-elements into functional systems by virtue of an elastomeric stamp. One important factor influencing the capability of this technique depends on the adhesion between the viscoelastic stamp and the transferred element. To provide theoretical guidance for the control of adhesion in the transfer printing process, a finite element model for the viscoelastic adhesive contact between a polydimethylsiloxane (PDMS) stamp and a spherical transferred element was established, in which the adhesive interaction was modeled by the Lennard-Jones surface force law. Effects of the unloading velocity, preload, and thermodynamic work of adhesion on the adhesion strength, characterized by the pull-off force, were examined for a loading-dwelling-unloading history. Simulation results showed that the unloading path deviated from the loading path due to the viscoelastic property of the PDMS stamp. The pull-off force increased with the unloading velocity, and the increasing ratio was large at first and then became low. Furthermore, the influence of the preload on increasing the pull-off force was more significant under larger unloading velocity than that under smaller unloading velocity. In addition, the pull-off force increased remarkably with the thermodynamic work of adhesion at a fixed maximum approach.

The adhesion/delamination characteristics at the stamp/film interface are critical for the efficiency of film microtransfer printing technology. To predict and regulate the interface mechanical behaviors, finite element models based on the J-integral, Virtual Crack Closure Technology (VCCT), and the cohesive zone method (CZM) were established and compared. Then, the effects of pulling speed and interface parameters on the pull-off force, which is used to characterize the interface adhesion strength, were investigated. Comparisons between the simulation results and previous experimental results demonstrated that the model based on the CZM was more applicable than the models based on the J-integral and VCCT in analyzing the adhesion/delamination behaviors of the stamp/film interface. Furthermore, the increase in pulling speed could enlarge the pull-off force for the viscoelastic stamp/film interface, while it had no influence on the pull-off force for the elastic stamp/film interface. In addition, a larger normal strength and normal fracture energy resulted in a larger pull-off force, which was beneficial to the realization of the picking-up process in microtransfer printing.