This study proposes a novel FSM compensation system for four degrees of freedom (DOF) laser errors compensation, which has the advantage of shorter optical path length, fewer elements and an easier set-up process, meaning that it can be used at different locations. A commercial software, Zemax, is used to evaluate the function of the proposed FSM compensation system and the mathematical modelling of the proposed FSM compensation system is established by using a skew-ray tracing method. Finally, the proposed FSM compensation system is then verified experimentally using a laboratory-built prototype and the result shows that the proposed FSM compensation system achieves the ability to compensate the 4 DOF of the laser source.

Laser beams can fluctuate in four directions, which requires active compensation by a fast steering mirror (FSM) motion system. This paper deals with the design of four-degrees-of-freedom (DoF) compliant parallel manipulators, for responding to the requirements of the FSM. In order to simplify high-precision control in parallel manipulators, maximum kinematic decoupling is always desired. A constraint map method is used to propose the four required DoF with the consideration of maximum kinematic decoupling. A specific compliant mechanism is presented based on the constraint map, and its kinematics is estimated analytically. Finite element analysis demonstrates the desired qualitative motion and provides some initial quantitative analysis. A normalization-based compliance matrix is finally derived to verify and demonstrate the mobility of the system clearly. In a case study, the results of normalization-based compliance matrix modelling show that the diagonal entries corresponding to the four DoF directions are about 10 times larger than those corresponding to the two-constraint directions, validating the desired mobility.