The detection of infrared radiation is of great interest for a wide range of applications, such as absorption sensing in the infrared spectral range. In this work, we present a CMOS compatible pyroelectric detector which was devised as a mid-infrared detector, comprising aluminium nitride (AlN) as the pyroelectric material and fabricated using semiconductor mass fabrication processes. To ensure thermal decoupling of the detector, the detectors are realized on a Si₃N₄/SiO₂ membrane. The detectors have been tested at a wavelength close to the CO₂ absorption region in the mid-infrared. Devices with various detector and membrane sizes were fabricated and the influence of these dimensions on the performance was investigated. The noise equivalent power of the first demonstrator devices connected to a readout circuit was measured to be as low as $5.3\times {10}^{-9}\mathrm{W}/\sqrt{\mathrm{Hz}}$ .

In recent years, there has been a significant increase in research into silicon-based on-chip sensing. In this paper, a coupled cavity waveguide (CCW) based on a slab photonic crystal structure was designed for use as a label-free biosensor. The photonic crystal consisted of holes arranged in a triangular lattice. The incorporation of defects can be used to design sensor devices, which are highly sensitive to even slight alterations in the refractive index with a small quantity of analyte. The plane wave expansion method (PWE) was used to study the dispersion and profile of the CCW modes, and the finite difference time domain (FDTD) technique was used to study the transmission spectrum, quality factor, and sensitivity. We present an analysis of adiabatically coupling light into a coupled cavity waveguide. The results of the simulation indicated that a sensitivity of 203 nm/RIU and a quality factor of 13,360 could be achieved when the refractive indices were in the range of 1.33 to 1.55.

Plasmonic slot waveguides have attracted much attention due to the possibility of high light confinement, although they suffer from relatively high propagation loss originating from the presence of a metal. Although the tightly confined light in a small gap leads to a high confinement factor, which is crucial for sensing applications, the use of plasmonic guiding at the same time results in a low propagation length. Therefore, the consideration of a trade-off between the confinement factor and the propagation length is essential to optimize the waveguide geometries. Using silicon nitride as a platform as one of the most common material systems, we have investigated free-standing and asymmetric gold-based plasmonic slot waveguides designed for sensing applications. A new figure of merit (FOM) is introduced to optimize the waveguide geometries for a wavelength of 4.26 µm corresponding to the absorption peak of CO₂, aiming at the enhancement of the confinement factor and propagation length simultaneously. For the free-standing structure, the achieved FOM is 274.6 corresponding to approximately 42% and 868 µm for confinement factor and propagation length, respectively. The FOM for the asymmetric structure shows a value of 70.1 which corresponds to 36% and 264 µm for confinement factor and propagation length, respectively.

This paper investigates the use of a miniaturized filter based on a triangular lattice of holes in a photonic crystal (PhC) slab. The plane wave expansion method (PWE) and finite-difference time-domain (FDTD) techniques were utilized to analyze the dispersion and transmission spectrum, as well as the quality factor and free spectral range (FSR) of the filter. A 3D simulation has demonstrated that for the designed filter, an FSR of more than 550 nm and a quality factor of 873 can be attained by adiabatically coupling light from a slab waveguide into a PhC waveguide. This work designs a filter structure that is implemented into the waveguide and is suitable for a fully integrated sensor. The small size of the device provides a strong potential for the realization of large arrays of independent filters on a single chip. The fully integrated character of this filter has further advantages such as reducing power loss in coupling light from sources to filters and also from filters to waveguides. The ease of fabrication is another benefit of completely integrating the filter.

In this study, we investigate the potential of one-dimensional plasmonic grating structures to serve as a platform for, e.g., sensitive refractive index sensing. This is achieved by comparing numerical simulations to experimental results with respect to the excitation of surface plasmon polaritons (SPPs) in the mid-infrared region. The samples, silver-coated poly-silicon gratings, cover different grating depths in the range of 50 nm–375 nm. This variation of the depth, at a fixed grating geometry, allows the active tuning of the bandwidth of the SPP resonance according to the requirements of particular applications. The experimental setup employs a tunable quantum cascade laser (QCL) and allows the retrieval of angle-resolved experimental wavelength spectra to characterize the wavelength and angle dependence of the SPP resonance of the specular reflectance. The experimental results are in good agreement with the simulations. As a tendency, shallower gratings reveal narrower SPP resonances in reflection. In particular, we report on 2.9 nm full width at half maximum (FWHM) at a wavelength of 4.12 µm and a signal attenuation of $21\%$. According to a numerical investigation with respect to a change of the refractive index of the dielectric above the grating structure, a spectral shift of $4122\frac{\mathrm{nm}}{\mathrm{RIU}}$ can be expected, which translates to a figure of merit (FOM) of about 1421 ${\mathrm{RIU}}^{-1}$. The fabrication of the suggested structures is performed on eight-inch silicon substrates, entirely accomplished within an industrial fabrication environment using standard microfabrication processes. This in turn represents a decisive step towards plasmonic sensor technologies suitable for semiconductor mass-production.

The design and modeling of a curved shape photonic crystal taper consisting of Si rods integrated with a photonic crystal waveguide are presented. The waveguide is composed of a hexagonal lattice of Si rods and optimized for CO₂ sensing based on absorption spectroscopy. We investigated two different approaches to design a taper for a photonic crystal waveguide in a hexagonal lattice of silicon rods. For the first approach (type 1), the taper consists of a square lattice taper followed by a lattice composed of a smooth transition from a square to a hexagonal lattice. In the second approach (type 2), the taper consists of a distorted hexagonal lattice. Different shapes, such as convex, concave, and linear, for the curvature of the taper were considered and investigated. The structure of the taper was improved to enhance the coupling efficiency up to 96% at a short taper length of 25 lattice periods. The finite-difference time-domain (FDTD) technique was used to study the transmission spectrum and the group index. The study proves the improvement of coupling using a curved shape taper. Controlling the group index along the taper could be further improved to enhance the coupling efficiency in a wider spectral range.