Surface acoustic wave (SAW)-based fluid atomizers are ideally suited to generate micrometer-sized droplets without any moving parts or nozzles. Versatile application fields can be found for instance in biomedical, aerosol or thin film technology, including medical inhalators or particle deposition for advanced surface treatment. Such atomizers also show great potential for on-chip integration and can lead to economic production of hand-held and even disposable devices, with either a single functionality or integrated in more complex superior systems. However, this potential was limited in the past by fluid supply mechanisms inadequate for mass production, accuracy and reliability. In this work, we briefly discuss existing fluid supply methods and demonstrate a straightforward new approach suited for reliable and cost-effective mass-scale manufacturing of SAW atomizer chips. Our approach is based on a fluid supply at the boundary of the acoustic beam via SU-8 microchannels produced by a novel one-layer/double-exposure photolithography method. Using this technique, we demonstrate precise and stable fluid atomization with almost ideal aerosol plume geometry from a dynamically stabilized thin fluid film. Additionally, we demonstrate the possibility of in situ altering the droplet size distribution by controlling the amount of fluid available in the active region of the chip.

SAW-based acoustofluidic blood platelet separation at 2.7 × 10 ⁴ cells per s throughput in a comprehensively analysed and numerical simulated, wafer-scale manufactured device.

In this work, we discuss and demonstrate the principle features of surface acoustic wave (SAW) aerosol generation, based on the properties of the fluid supply, the acoustic wave field and the acoustowetting phenomena. Furthermore, we demonstrate a compact SAW-based aerosol generator amenable to mass production fabricated using simple techniques including photolithography, computerized numerical control (CNC) milling and printed circuit board (PCB) manufacturing. Using this device, we present comprehensive experimental results exploring the complexity of the acoustic atomization process and the influence of fluid supply position and geometry, SAW power and fluid flow rate on the device functionality. These factors in turn influence the droplet size distribution, measured here, that is important for applications including liquid chromatography, pulmonary therapies, thin film deposition and olfactory displays.

Current trends in miniaturized diagnostics indicate an increasing demand for large quantities of mobile devices for health monitoring and point-of-care diagnostics. This comes along with a need for rapid but preferably also green microfabrication. Dry film photoresists (DFPs) promise low-cost and greener microfabrication and can partly or fully replace conventional silicon-technologies being associated with high-energy demands and the intense use of toxic and climate-active chemicals. Due to their mechanical stability and superior film thickness homogeneity, DFPs outperform conventional spin-on photoresists, such as SU-8, especially when three-dimensional architectures are required for micro-analytical devices (e.g. microfluidics). In this study, we utilize the commercial epoxy-based DFP ADEX to demonstrate various application scenarios ranging from the direct modification of microcantilever beams via the assembly of microfluidic channels to lamination-free patterning of DFPs, which employs the DFP directly as a substrate material. Finally, kinked, bottom-up grown silicon nanowires were integrated in this manner as prospective ion-sensitive field-effect transistors in a bio-probe architecture directly on ADEX substrates. Hence, we have developed the required set of microfabrication protocols for such an assembly comprising metal thin film deposition, direct burn-in of lithography alignment markers, and polymer patterning on top of the DFP.

Precise manipulation of (sub)micron particles is key for the preparation, enrichment, and quality control in many biomedical applications. Surface acoustic waves (SAW) hold tremendous promise for manipulation of (bio)particles at the micron to nanoscale ranges. In commonly used SAW tweezers, particle manipulation relies on the direct acoustic radiation effect whose superior performance fades rapidly when progressing from micron to nanoscale particles due to the increasing dominance of a second order mechanism, termed acoustic streaming. Through reproducible and high-precision realization of stiff microchannels to reliably actuate the microchannel cross-section, here we introduce an approach that allows the otherwise competing acoustic streaming to complement the acoustic radiation effect. The synergetic effect of both mechanisms markedly enhances the manipulation of nanoparticles, down to 200 nm particles, even at relatively large wavelength (300 μm). Besides spherical particles ranging from 0.1 to 3 μm, we show collections of cells mixed with different sizes and shapes inherently existing in blood including erythrocytes, leukocytes, and thrombocytes.

Adjusting focused IDT curvature according to the substrate slowness curve permits better focusing for enhanced acoustofluidic microparticle capture.