The capability to accurately handle liquids in small volumes is a key point for the development of lab-on-chip devices. In this paper, we investigate an application of surface acoustic waves (SAW) for positioning micro-droplets. A SAW device based on a 2 times 2 matrix of inter-digital transducers (IDTs) has been fabricated on a (YXl)/128deg LiNbO₃ substrate, which implies displacement and detection in two dimensions of droplets atop a flat surface. Each IDT operates at a given frequency, allowing for an easy addressing of the active channel. Furthermore, very low cross-talk effects were observed as no frequency mixing arose in our device. Continuous as well as pulsed excitations of the IDTs have been studied, yielding, respectively, continuous and step-by-step droplet displacement modes. In addition, we also have used these two excitation types to control the velocity and the position of the droplets. We also have developed a theoretical analysis of the detection mode, which has been validated by experimental assessment.

The micro-conveyor is a 9 × 9 mm² manipulation surface able to move millimeter-sized planar objects in the four cardinal directions using air flows. Thanks to a specific design, the air flow comes through a network of micro-channels connected to an array of micro-nozzles. Thus, the micro-conveyor generates an array of tilted air jets that lifts and moves the object in the required direction. In this paper, we characterize the device for transport and positioning tasks and evaluate its performances in terms of speed, resolution and repeatability. We show that the micro-conveyor is able to move the object with a speed up to 137 mm · s^-1 in less than 100 ms whereas the positioning repeatability is around 17.7 μm with feedback control. The smallest step the object can do is 0.3 μm (positioning resolution). Moreover, we estimated thanks to a dynamic model that the speed could reach 456 mm· s^-1 if several micro-conveyors were used to form a conveying line.