TiCrAlN hard films based on TiN or CrN show superior properties in terms of hardness, wear resistance, and thermal stability due to the addition of alloying elements. AlCrTiN films based on AlN may have higher thermal shock properties, but the knowledge of AlCrTiN films with high Al content has been insufficient until now. In this study, two sets of AlCrTiN hard films with different Al contents of 48 at.% and 58 at.% among metal components were prepared via multi-arc ion plating so as to investigate the effect of Al content on the phase composition, hardness, and thermal shock resistance of the films. The same microstructures, morphologies, and thicknesses of the fabricated film samples were achieved by changing the combination of cathode alloy targets and adjusting the arc source current during deposition. The surface chemical composition, cross-sectional elemental distribution, microstructure, morphology, phase composition, surface hardness, film/substrate adhesion strength, and thermal shock performance of the AlCrTiN films were examined. The obtained results reveal that the two sets of AlTiCrN hard films are face-centered cubic solid solutions with a columnar fine grain structure and a preferred growth orientation of (200) crystal plane. The hardness of the AlCrTiN films can be improved up to HV2850 by properly reducing the Al content from 58 at.% to 48 at.%. Meanwhile, the film/substrate adhesion performance is strong enough in terms of critical loads greater than 200 N. Furthermore, the AlCrTiN films maintain high thermal shock resistance at 600 °C when the Al content decreases from 58 at.% to 48 at.%. The optimal composition of the AlCrTiN hard films is 25:13:15:47 (at.%), based on the consideration of hardness, adhesion, and thermal shock cycling resistance. This optimal AlCrTiN hard film can be suggested as an option for protective coatings of hot process die tools.

Ti_xZr_1−xN hard films with Zr/(Zr+Ti) molar ratios from 20% to 80% were prepared by multi-arc ion plating using any two of elemental Ti, elemental Zr, and TiZr alloy targets. The as-deposited Ti_xZr_1−xN films displayed similar surface and fracture cross-section morphologies and thicknesses. The effects of Zr/(Zr+Ti) molar ratio on the phase composition, preferred growth orientation, and hardness of the films were discussed. The results showed that the as-deposited films had a face-centered cubic structure and exhibited the typical characteristics of substitutional solid solutions. The lattice constant of the films increased monotonically with increasing Zr/(Zr+Ti) molar ratio. Two preferred growth orientations, corresponding to the two hardness peak values, occurred symmetrically at Zr/Ti molar ratios of 40:60 and 60:40. An inflection point with a small reduction in hardness was observed at the Zr/Ti molar ratio of 50:50.