The poor hydrophilicity of polyimide (PI) films limits their applications in flexible electronics, such as in wearable and implantable bio-MEMS devices. In this paper, an atmospheric pressure Ar/H₂O microplasma jet (μAPPJ) with a nozzle diameter of 100 μm was utilized to site-selectively tune the surface hydrophilicity of a PI film. The electrical and optical characteristics of the μAPPJ were firstly investigated, and the results showed that multi-spikes occurred during the plasma discharge and that diverse reactive species, such as O atoms and OH radicals, were generated in the plasma plume. The physical and chemical properties of pristine and microplasma-modified PI surfaces were characterized by the water contact angle (WCA), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS). The wettability of the PI surface was significantly enhanced after microplasma modification, and the WCA could be adjusted by varying the applied voltage, water vapor content, plasma treatment time and storage time. The AFM images indicated that the surface roughness increased after the plasma treatment, which partially contributed to an improvement in the surface hydrophilicity. The XPS results showed a reduction in the C content and an increase in the O content, and abundant hydrophilic polar oxygen-containing functional groups were also grafted onto the PI film surface. Finally, the interaction mechanism between the PI molecular chains and the microplasma is discussed. The breaking of C-N and C-O bonds and the grafting of OH radicals were the key pathways to dominate the reaction process.

Atmospheric cold plasma jets with various configurations have drawn intense interests in diverse applications, such as surface modification and endoscopic applications. In this paper, a long and ultra-flexible micro-sized cold plasma jet generator is presented and its characteristics are analyzed. The generator mainly consists of two concentric silicone tubes with the inner one acting as the gas channel and the outer one acting as insulating layer of heat and high voltage. Gold thin film was sputtered on the circular surface of inner tube to work as the electrode as well as separation layer of ultraviolet radiation. Electrical, optical and thermal characteristics of this generator were investigated. Cold microplasma jet can be generated and ejected to the ambient air with the length varied from 0.1 m to 2.5 m, and it can impact on the finger without electric and heat sensation. Optical emission spectra analysis indicated that reactive species like OH and O atoms were generated in the plasma. This device exhibits ultra-flexible property which can be arbitrarily bent and plugged into complex and deep environment. Localized internal surface modification of polyvinyl chloride tube using this microplasma jet was also demonstrated and the result showed that surface wettability can be greatly improved after plasma treatment. This generator shows great potential for internal surface processing, plasma endoscopic and maskless lithography applications.