In the era of Industry 4.0, numerous AI technologies have been widely applied. However, implementation of the AI technology requires observation, analysis, and pre-processing of the obtained data, which takes up 60–90% of total time after data collection. Next, sensors and features are selected. Finally, the AI algorithms are used for clustering or classification. Despite the completion of data pre-processing, the subsequent feature selection and hyperparameter tuning in the AI model affect the sensitivity, accuracy, and robustness of the system. In this study, two novel approaches of sensor and feature selecting system, and hyperparameter tuning mechanisms are proposed. In the sensor and feature selecting system, the Shapley Additive ExPlanations model is used to calculate the contribution of individual features or sensors and to make the black-box AI model transparent, whereas, in the hyperparameter tuning mechanism, Hyperopt is used for tuning to improve model performance. Implementation of these two new systems is expected to reduce the problems in the processes of selection of the most sensitive features in the pre-processing stage, and tuning of hyperparameters, which are the most frequently occurring problems. Meanwhile, these methods are also applicable to the field of tool wear monitoring systems in intelligent manufacturing.

Chemical vapor deposition (CVD) is a high-precision thin-film fabrication technique that is widely applied in semiconductor manufacturing, optical component manufacturing, and materials science. The performance of the deposition process plays a critical role in determining the quality of the final product. However, multiple variables in CVD processes have a highly nonlinear nature that involves complex interactions. Therefore, conventional experimental methods exhibit limitations in quality control and process optimization for CVD. In this study, we developed a predictive model based on process parameters and quality indicators using machine learning techniques to analyze and optimize the CVD processes. Through data collection, feature selection, model training, and model validation, the developed machine-learning algorithms were tested and evaluated. The adopted machine learning algorithms effectively captured the nonlinear relationships between multiple variables in CVD processes, accurately predicted thin-film quality indicators, and provided data for optimizing process parameters. In addition, the analysis results of feature importance revealed the effect of each key parameter on product quality, offering a basis for process improvement. Overall, the results of this study highlight the capability of machine learning algorithms for quality control and optimization in CVD processes for future advancements in smart manufacturing.

This study developed a movable, high-precision laser measurement system for assessing wear on cup grinding wheels. The proposed setup employs a Keyence CL-P070 laser sensor with a resolution of 0.25 μm and has a simple installation process that supports flexible deployment on multiple workstations. Unlike traditional static configurations, the compact design requires minimal adjustment and enables versatile positioning across operational environments. An automated measurement procedure was developed that can capture changes in the grinding wheel profile between grinding cycles. The experimental results indicate that the proposed system has high repeatability and accuracy in detecting the subtle progression of wear in cup grinding wheels. The proposed approach provides a user-friendly on-machine measurement solution that can improve quality control and operational efficiency in industrial grinding processes.