Deep and narrow groove structures are widely used in aviation, aerospace, weapons, and other industries, and play a very important role. In order to solve the problems of machining tool deformation, machining flying edge, burr in traditional Computerized Numerical Control (CNC) milling for deep and narrow grooves, and the problems of serious motor loss and low machining efficiency in non-contact electrical discharge machining (EDM), electrochemical mask machining through the mask treatment of the non-processed part mask processing, and with no loss of the processing cathode tool, was suggested as an efficient way to solve these problems. Considering that the corrosion removal of the anodic workpiece is mainly subject to the multi-physical field coupling action between the electric field, the flow field, and the temperature field, it is necessary to construct a multi-physical field coupling model of electrochemical mask machining and combine this with the numerical simulation analysis to realize the distribution state of the multi-physical field, so as to realize the optimization guidance of the overall processing process.