This study presents a novel sulfuration–desulfuration sensing effect of an intrinsic ( i.e. , uncatalyzed) ZnO nanowire array for trace-level detection of H ₂ S. The novel H ₂ S sensing mechanism is clarified by specifically designed experiments, material characterization and theoretical analysis.

Nanomaterials are widely utilized as sensing materials in semiconductor gas sensors. As sensor sizes continue to shrink, it becomes increasingly challenging to construct micro-scale sensing materials on a micro-sensor with good uniformity and stability. Therefore, in-situ growth with a desired pattern in the tiny sensing area of a microsensor is highly demanded. In this work, we combine area-selective seed layer formation and hydrothermal growth for the in-situ growth of ZnO nanowires (NWs) on Micro-electromechanical Systems (MEMS)-based micro-hotplate gas sensors. The results show that the ZnO NWs are densely grown in the sensing area. With Pd nano-particles’ modification of the ZnO NWs, the sensor is used for hydrogen (H₂) detection. The sensors with Pd-ZnO NWs show good repeatability as well as a reversible and uniform response to 2.5 ppm–200 ppm H₂. Our approach offers a technical route for designing various kinds of gas sensors.

We investigate the MEMS resonant cantilevers for high-performance thermogravimetric analysis (TGA) of chemical decomposition, featuring high accuracy and minimized thermal lag. Each resonant cantilever is integrated with a microheater for sample heating near the free end, which is thermally isolated from the resonance excitation and readout elements at the fixed end. Combining finite element modeling and experiments, we demonstrate that the sample loading region can stabilize within ~11.2 milliseconds in response to a step heating of 500 °C, suggesting a very fast thermal response of the MEMS resonant cantilevers of more than 10⁴ °C/s. Benefiting from such a fast thermal response, we perform high-performance TG measurements on basic copper carbonate (Cu₂(OH)₂CO₃) and calcium oxalate monohydrate (CaC₂O₄·H₂O). The measured weight losses better agree with the theoretical values with 5–10 times smaller thermal lags at the same heating rate, compared with those measured by using conventional TGA. The MEMS resonant cantilevers hold promise for highly accurate and efficient TG characterization of materials in various fields.