Based on the multi-chamber series structure, a piezoelectric micropump with high output performance is proposed in this paper. The proposed micropump is composed of the circular unimorph piezoelectric vibrator, the cantilever check valve, and the pump body. First, the working process of the piezoelectric micropump was analyzed in detail. Then, the effect of the key dimension parameters on the output performance of the micropump was explored. The key dimension parameters mainly refer to the height of the pump chamber and valve opening (the deformation size of the valve). Finally, experimental prototypes with different parameters were fabricated for the evaluation of the output performance of the micropump. The experimental results show that when the pump chamber height is 0.1 mm and the valve opening is 0.4 mm, the piezoelectric micropump has a good comprehensive output performance. In particular, at 170 V and 120 Hz, the maximum flow rate of the dual-chamber series pump is 65.5 mL/min, and at 100 Hz, the maximum output pressure reaches 59.1 kPa. Moreover, at a certain voltage of 170 V, when the drive frequency is 450 Hz and 550 Hz, the output flow rate and pressure of the four-chamber series pump reach a maximum of 110 mL/min and exceed 140 kPa, respectively. In addition, the volumes of the proposed single-chamber, dual-chamber series, and four-chamber series micropumps are 22 mm × 22 mm × 5 mm, 32.6 mm × 22 mm × 5 mm, and 53.8 mm × 22 mm × 5 mm, respectively. The proposed piezoelectric micropump has the advantages of simple structure, low cost, miniaturization, and high output performance, thus gaining potential practicality for biomedical applications, cooling systems, fuel supply, chemical applications, etc.

The synthetic jet piezoelectric air pump is a potential miniature device for electronic cooling. In order to improve the performance of the device, a small-sized synthetic jet piezoelectric air pump is proposed in this work, which is mainly characterized by petal-shaped inlet channels. First, the structure and working principle of the piezoelectric vibrator and the proposed pump are analyzed. Then, three synthetic jet piezoelectric air pumps with different inlet channels are compared. These inlets are the direct channels, the diffuser/nozzle channels, and the petal-shaped channels, respectively. Furthermore, the performance of the synthetic jet piezoelectric air pump with the petal-shaped inlet channels is optimized by orthogonal tests. Finally, the simulation was used to investigate the heat dissipation capability of the synthetic jet piezoelectric pump. The experimental results show that among the three inlet channels, the petal-shaped channel can greatly improve the performance of the pump. The unoptimized pump with petal-shaped channels has a maximum flow rate of 1.8929 L/min at 100 V, 3.9 kHz. Additionally, the optimized pump with petal-shaped channels reaches a maximum flow rate of 3.0088 L/min at 100 V, 3.7 kHz, which is 58.95% higher than the unoptimized one. The proposed synthetic jet piezoelectric air pump greatly improves the output performance and has the advantages of simple structure, low cost, and easy integration. The convective heat transfer coefficient of the synthetic jet piezoelectric pump is 28.8 $\mathrm{W}/\left({\mathrm{m}}^2·°\mathrm{C}\right)$, which can prove that the device has a better heat dissipation capability.