Taking advantage of the concurrent stretching and bending property of corrugated flexure hinges, a sinusoidal corrugated flexure linkage was proposed and applied for the construction of a corrugated dual-axial mechanism with structural symmetry and decoupled planar motion guidance. Castigliano’s second theorem was employed to derive the complete compliance for a basic sinusoidal corrugated flexure unit, and matrix-based compliance modeling was then applied to find the stiffness of the sinusoidal corrugated flexure linkage and the corrugated dual-axial mechanism. Using established analytical models, the influence of structural parameters on the stiffness of both the corrugated flexure linkage and the dual-axial mechanism were investigated, with further verification by finite element analysis, with errors less than 20% compared to the analytical results for all cases. In addition, the stiffness of the corrugated flexure mechanism was practically tested, and its deviation between practical and analytical was around 7.4%. Further, the feasibility of the mechanism was demonstrated by successfully applying it for a magnetic planar nanopositioning stage, for which both open-loop and closed-loop performances were systematically examined. The stage has a stroke around 130 $\mathsf{\mu }$m for the two axes and a maximum cross-talk less than 2.5%, and the natural frequency is around 590 Hz.

This paper reports on a dual-axial tool servo diamond turning method for the one-step fabrication of hierarchical micro-nano-structured surfaces. With respect to the dual-axial servo motion (XZ), the z-axis motion can generate the primary surface with a complex shape, and the x-axis motion is used to synchronously form the secondary structure via controlling the residual tool marks. The toolpath determination algorithm for the developed turning method is described in detail, and the effect of the machining parameters on the basic feature and sizes of the generated secondary structures is investigated through conducting the numerical simulation for both toolpath and surface generation. The simulation result indicates that the additional x-axial motion is effective for the deterministic generation of a variety of secondary structures. Finally, taking advantage of an ultra-precision lathe with a self-developed tri-axial FTS, a hierarchical surface with high accuracy is practically generated.

为了提高微结构加工中的在位测量效率, 本文提出一种基于白光干涉原理的微结构光学表面形貌快速在位测量方法. 该方法仅采集特定轴向间隔的两幅干涉图像, 进而通过所构建的灰度-高度映射关系实现微结构表面形貌的快速重建, 避免了传统轴向扫描数据存储量大和效率低等不足. 针对该方法, 详细分析了影响测量精度的主要因素, 证明了测量系统抵抗外部纳米振动的能力, 确定了关键测量参数的最优取值范围. 为验证新方法的有效性, 基于超精密车床和白光干涉装置搭建了在位测量系统, 结合子孔径拼接测量技术实现了典型微结构表面的大视场测量. 实验结果表明, 在位测量系统仅需采集16张干涉图像进行表面重建, 传统扫描白光干涉方法则需要1024张, 且两者测量面型均方根偏差为9.1367 nm, 验证了所提出方法的高效性和精确性.