Diamond-like carbon (DLC) film is widely used due to its excellent properties, such as high hardness and high wear resistance. To investigate the advantages of DLC film applied on the surface of Mg alloy, direct current (DC) pulse magnetron sputtering was used to prepare DLC film via plasma sputtering a graphite target and introducing C₂H₂ gas. The silicon interlayer was fabricated by sputtering the Si target. A scanning electron microscope (SEM), transmission electron microscope (TEM), a nano-indentation instrument, an electrochemical workstation and a pin-on-disc tester were employed to obtain the surface morphology, microstructure, mechanical properties, corrosion behavior and wear resistance of the obtained film, respectively. The results show that the DLC films are dense and compact, and the structure changes from amorphous to nanocrystalline with the increase of C₂H₂ flow. The film prepared at low C₂H₂ flow has larger surface roughness, lower deposition rate, higher hardness and elasticity modulus, poorer corrosion resistance and better wear resistance, compared with the film prepared at higher acetylene flow. The self-corrosion potential of the obtained DLC film is higher than −0.95 V, the corrosion current density is 10⁻⁷ A/cm² orders of magnitude, and the wear rate is 10⁻⁹ mm³/Nm orders of magnitude. The friction coefficient of the film is less than 0.065, the hardness is 17.3 to 22.1 MPa, and the elastic modulus is 145 to 170 MPa. The DLC films obtained on the surface of AZ91 alloy have good comprehensive properties.

Composite titanium carbonitride (TiCN) thin films deposited on AZ31 by DC/RF magnetron sputtering were vacuum annealed at different temperatures. Vacuum annealing yields the following on the structure and properties of the films: the grain grows and the roughness increases with an increase of annealing temperature, the structure changes from polycrystalline to single crystal, and the distribution of each element becomes more uniform. The residual stress effectively decreases compared to the as-deposited film, and their corrosion resistance is much improved owing to the change of structure and fusion of surface defects, whereas the wear-resistance is degraded due to the grain growth and the increase of surface roughness under a certain temperature.

Nanosized TiCN/TiN films were deposited on AZ31 by reactive magnetron sputtering under different acetylene flows. The microstructures of obtained films were characterized, and their corrosion behaviors were also investigated. The films doped with carbon atoms under different acetylene flows own different structures and grain sizes. The grain size decreased to some extent, and the film structure changed from polycrystalline to nanocrystalline, with an increase of C₂H₂ flow. The surface morphology also changed from rough to smooth, with an increase of C₂H₂ flow. The Tafel curves and electrochemical impedance spectroscopy (EIS) demonstrated that the composite films could greatly improve the corrosion resistance of bare substrates in a 3.5% NaCl solution, and the films’ corrosion resistance is different, owing to their different structures and grain sizes.