In this paper, the basic concepts of the equivalent model, vibration modes, and conduction mechanisms of MEMS resonators are described. By reviewing the existing representative results, the performance parameters and key technologies, such as quality factor, frequency accuracy, and temperature stability of MEMS resonators, are summarized. Finally, the development status, existing challenges and future trend of MEMS resonators are summarized. As a typical research field of vibration engineering, MEMS resonators have shown great potential to replace quartz resonators in timing, frequency, and resonant sensor applications. However, because of the limitations of practical applications, there are still many aspects of the MEMS resonators that could be improved. This paper aims to provide scientific and technical support for the improvement of MEMS resonators in timing, frequency, and resonant sensor applications.

Compared to conventional sensors, resonant-based sensors output frequency signals instead of voltage signals and therefore have greater advantages in terms of accuracy, noise resistance, and miniaturization. However, the resonant frequency is sensitive to temperature variation. The oven controlled MEMS oscillators (OCMOs) have proven to be the most promising candidate for highly accurate oscillators. Therefore, when the OCMO is used for timing and sensing applications, better device temperature stability and performance are expected. However, OCMOs are still in the development stage from laboratory to commercial products, and there are few related reviews about OCMOs. This paper reviews typical results of OCMOs in the past decade with the aim of supporting the development of frequency reference and resonant-based sensors. We emphasized the importance of temperature control for OCMOs. Then, the basic concepts and models of the OCMO are introduced. and the development trend of the OCMO is discussed from three aspects: device structure, sensing mechanism, and heating control systems. Finally, the fabrication process, conclusion and outlook are given.

This paper systematically investigates the frequency stability of a radial-contour-mode micromechanical disk resonators with high quality factor (Q-factor) and high resonance frequency. Microelectromechanical system (MEMS)-based oscillator prototype consisting of the resonator and off-chip circuit is realized for frequency reference. The sustaining circuit is designed using impedance matching networks and two op-amp stages with automatic gain control circuit. The oscillator reaches a short-term frequency stability of ±1 ppm and a medium-term frequency stability of ±5 ppm over industrial temperature range (-40 °C-85 °C), which outperforms some of the best MEMS oscillators. Meanwhile, the phase noise is -95 dBc/Hz at 10 kHz offset and 149-MHz carrier. This paper also presents a simple and effective compensation scheme by combining built-in microoven and bias voltage tuning, which can achieve a frequency stability range of 2 ppm at temperature ranges from 20 °C to 100 °C.

This paper presents a robust, low-power MEMS temperature control platform featuring a novel hybrid control strategy combining Genetic Algorithm and Particle Swarm Optimization (GA PSO) with Fuzzy PID control. Two heater structures, loop and bent types, are designed and simulated to enhance temperature uniformity, revealing that the bent configuration with an electrode thickness of 500 nm provides superior stability. The key innovation lies in the hybrid GA PSO-Fuzzy PID approach, which autonomously optimizes proportional–integral–derivative (PID) parameters, removing the necessity for manual tuning. This methodology effectively reduces temperature overshoot and accelerates response times, outperforming conventional GA PSO-PID control. Experimental results demonstrate substantial performance improvements, including a faster rise time by 1.98 seconds, reduced peak time by 13.4 seconds, and a shorter settling time by 4.8 seconds. Additionally, the platform shows superior disturbance rejection capabilities, quickly recovering to target temperatures. The straightforward design and fabrication process ensures adaptability across various MEMS heater geometries, underscoring the approach’s potential for advanced thermal management applications in MEMS devices.