Porous tungsten oxide films were deposited onto a sensor substrate with a Si bulk-micromachined hotplate, by drop-coating isopropyl alcohol solution of highly crystalline tungsten oxide nanorods with average length and diameter. The temperature-dependent gas sensing characteristics of the films have been investigated over the mild temperature range from . While the sensing responses for ammonia vapor showed increase in electrical conductivity at temperatures above as expected for -type metal oxide sensors, they exhibited the opposite behavior of unusual conductivity decrease below . Superb sensing ability of the sensors at room temperature in conjunction with their anomalous conductivity behavior might be attributed to unique nanostructural features of very thin, nonstoichiometric .
1 December 2000 in Journal of the Electrochemical Society