Laser processing with ultra-short double pulses has gained attraction since the beginning of the 2000s. In the last decade, pulse bursts consisting of multiple pulses with a delay of several 10 ns and less found their way into the area of micromachining of metals, opening up completely new process regimes and allowing an increase in the structuring rates and surface quality of machined samples. Several physical effects such as shielding or re-deposition of material have led to a new understanding of the related machining strategies and processing regimes. Results of both experimental and numerical investigations are placed into context for different time scales during laser processing. This review is dedicated to the fundamental physical phenomena taking place during burst processing and their respective effects on machining results of metals in the ultra-short pulse regime for delays ranging from several 100 fs to several microseconds. Furthermore, technical applications based on these effects are reviewed.

Laser surface micropatterning (texturing) of hard materials and coatings is an effective technique to improve tribological systems. In the paper, we have investigated the laser-induced surface modifications and micropatterning of diamond-like nanocomposite (DLN) films (a-C:H,Si:O) using IR and visible femtosecond (fs) lasers, focusing on the improvement of frictional properties of laser-patterned films on the micro and macroscale. The IR and visible fs-lasers, operating at λ = 1030 nm and λ = 515 nm wavelengths (pulse duration 320 fs and pulse repetition rate 101 kHz), are used to fabricate different patterns for subsequent friction tests. The IR fs-laser is applied to produce hill-like micropatterns under conditions of surface graphitization and incipient ablation, and the visible fs-laser is used for making microgroove patterns in DLN films under ablation conditions. Regimes of irradiation with low-energy IR laser pulses are chosen to produce graphitized micropatterns. For these regimes, results of numerical calculations of the temperature and graphitized layer growth are presented to show good correlation with surface relief modifications, and the features of fs-laser graphitization are discussed based on Raman spectroscopy analysis. Using lateral force microscopy, the role of surface modifications (graphitization, nanostructuring) in the improved microfriction properties is investigated. New data of the influence of capillary forces on friction forces, which strongly changes the microscale friction behaviour, are presented for a wide range of loads (from nN to μN) applied to Si tips. In macroscopic ball-on-disk tests, a pair-dependent friction behaviour of laser-patterned films is observed. The first experimental data of the improved friction properties of laser-micropatterned DLN films under boundary lubricated sliding conditions are presented. The obtained results show the DLN films as an interesting coating material suitable for laser patterning applications in tribology.

The combination of diffractive optical elements or spatial light modulators with fully synchronized galvo scanners offers a possibility to scale up machining processes with ultra-short pulses to several 100 W of average power with minimal thermal impact. This will be demonstrated with the high-rate applications multi-pulse drilling on the fly and material removal with special intensity distributions up to an average power of 162 W and a removal rate of 16.5 mm³/min. Based on the experimental results strategies to achieve drilling rates of several 10,000 holes/s or removal rates of multiple 10 mm³/min will be discussed.

To be competitive in laser micro machining, high throughput is an important aspect. One possibility to increase productivity is scaling up the ablation process i.e. linearly increasing the laser repetition rate together with the average power and the scan speed. In the MHz-regime high scan speeds are required which cannot be provided by commercially available galvo scanners. In this work we will report on the results by using a polygon line scanner having a maximum scan speed of 100 m/s and a 50 W ps-laser system, synchronized via the SuperSync™ technology. We will show the results concerning the removal rate and the surface quality for working at the optimum point i.e. most efficient point at repetition rates up to 8.2 MHz.

In this paper, we have investigated the burst mode (BM) ablation and surface structuring of diamondlike nanocomposite (DLN) a-C:H:Si:O films with femtosecond laser pulses (wavelength λ = 515 nm, pulse duration τ = 320 fs, and pulse repetition rate f = 100 kHz) under different scanning conditions (single spots and linear structures). The pulse separation in the bursts is 25 ns (intraburst frequency f = 40 MHz), and the pulse number is varied from 1 to 8. The ablation depth and specific ablation rates (μm³/μJ) are found to be higher for the burst mode compared to single-pulse irradiation, increasing with the pulse number in the burst. The obtained experimental data of the higher ablation efficiency are shown to correlate with computer simulations of the BM ablation. In correlation with the ablation findings, Raman spectra of single spots and microgrooves have evidenced a growing graphitization of the amorphous film structure with the pulse number in the bursts (at an equal energy deposited into the films). Contact-mode atomic force microscopy (AFM) is applied to reveal an influence of the BM processing on the surface properties (nanoscale relief, friction) of laser-structured films. Based on the ablation and Raman data analysis, AFM examination of ablated/redeposited layers, and computer simulations of the burst mode ablation, the heat accumulation is identified as the main factor responsible for the enhanced ablation efficiency during the BM processing of DLN films. In addition, results of the high precision surface microstructuring of DLN films in the burst mode are presented.