Micro-displacement detection plays a vital role in the position diagnosis and accurate calibration of MEMS actuators. An optical micro-displacement detector proposed in this paper integrated a vertical cavity surface emitting laser (VCSEL) and nine photodiodes (PDs) to detect the sub-micrometer translation and sub-degree rotation of the piezoelectric micro vibratory stage under the limited space. The highly accurate detection was mainly realized by PDs design and quality improvement. Nine PDs layout with high resolution optical sensors and corresponding calculation guaranteed the detector to precisely acquire out-of-plane displacement and two axis rotation of vibratory platform. And the introduction of the light absorbing layer and the light shielding layer further improved the sensing quality to reach a higher measurement resolution. The micro stage was fabricated by MEMS technology and the experiments of measurement system indicated that the out-of-plane displacement detection accuracy was 150nm in the range of 500μm and the angle detection accuracy reached to 0.1° in the range of 2°.