To improve the load identification capability and high overloading-resistibility of the silicon-based micro electromechanical system (MEMS) setback safety device, a MEMS setback safety device with curved zig-zag tracks as the primary load identification mechanism is designed in this paper. The dynamic response of the device under launch and drop load is obtained by the finite Element Method (FEM) simulation. The result shows that the setback safety device can effectively identify the launch load and distinguish the service load. Moreover, the strength model of the curved zig-zag tracks in the collision is established by the quasi-static method. The strength model is verified by FEM simulation, and the result is highly consistent with the FEM simulation result. The influence of structure parameters on the strength of zig-zag tracks was analyzed. Moreover, the methods to improve the overloading-resistibility of structure with surfaces collision are given. The impact experiment platform was established by Marchant Hammer and two types of experiments were conducted: (a) Multiple impact with increasing load amplitude on a single device. (b) Single high amplitude impact on the device. The result shows that the device has sufficient strength while being able to effectively differentiate between drop loads.

To improve the reliability and safety of the micro-electro-mechanical system (MEMS) safety and arming devices (SAD), this paper investigated the dynamic response of the cantilever-type MEMS setback arming device under impact loads. Based on the modal superposition method, the dynamic response of the structure is analyzed using the Euler-Bernoulli beam theory. The continuous dynamics model considering the self-weight of the cantilever was established. And the established model can obtain the dynamic response of the entire structure under impact loads. Moreover, the influence of structure parameters on the dynamic characteristics was analyzed by theoretical analysis. The results obtained in the theoretical analysis are highly in agreement with the finite element method (FEM) simulation. Furthermore, the maximum displacement and its occurrence time at fundamental frequency are given. The dynamic visualization experiment was employed for the cantilever-type MEMS setback arming device under impact loads. Multiple experiments showed that the established theoretical model is in high agreement with the experimental results. The dynamic response of the cantilever-type MEMS setback arming device under impact loads is significant for improving the reliability and safety of the system. It provides theoretical guidance for the optimization design.