Investigation of pulsed electric field (PEF) treatment of yeast at 20 kV/cm using chambers with BaTiO₃ dielectric layers was conducted in this study. The sterile rate as well as concentrations of metallic ions and hydroxyl radicals were measured to assess the PEF performance. The results indicated that generation of metallic ions could be reduced by 90%. However, a much higher field strength would be required for satisfactory sterilization due to the Maxwell-Wagner field relaxation, and reactions between the dielectric barriers and liquid could also occur. It was also proven that the continuous presence of a sufficient electric field is the main factor that inactivates the microorganism.